Back to Home
266 nm Deep UV Lasers

Wafer inspection · UV Raman · Photolithography · MALDI

266 nm Deep UV Lasers

266 nm is the fourth-harmonic generation (FHG) ultraviolet line of 1064 nm Nd:YAG and Nd:YVO₄ lasers. Its deep-UV photon energy (4.66 eV) makes it essential for semiconductor wafer defect inspection, fluorescence-free UV Raman spectroscopy, direct-write photolithography, MALDI-TOF mass spectrometry, and precision micromachining of wide-bandgap materials. Models range from milliwatt CW systems with high beam quality to high-peak-power Q-switched and picosecond pulsed configurations.

36 models4 seriesquote after qualification

Key applications

  • Semiconductor wafer defect inspection
  • UV resonance Raman spectroscopy
  • Direct-write photolithography
  • MALDI-TOF mass spectrometry
  • Laser micromachining of glass and sapphire

36 models · 4 series

266nm CW DUV Laser

31 models
ModelWavelengthOutput / average powerPulse energyRepetition ratePulse widthSpectral linewidthPower stabilityTransverse modeBeam diameter at the aperture (1/e2, mm)Warm-up time (minutes)Cooled method (Water Cooled)Operating temperature (℃)Modulation optionOperating voltage (VDC)Expected lifetime (hours)Power stability (rms, 4 hours , ±3℃)Mode-locked all fiber pulsed laser at 266nmM2Polarization ratio (dB)Delivery fiber length(cm)Cooled methodFundamental FrequencyDelivery fiber length (cm)Power stability (rms, 4 hours , ±3°C)Beam diameter at the aperture (mm)Polarization ratioPower supply (100-240VAC)Beam divergence, full angle (mrad)Beam diameter at the aperture 1/e2 (mm)Power stability (rms, 4 hours ± 3°C)Operating voltage(VDC)Operating temperatureJitter (ns, sdev) (optional)Pointing stability over temperature (urad/℃)Beam diameter (mm)Power supply (24VDC)energyPower supply (110/220VAC)High energy diode pumped all solid statepulsefeatures of high single pulse energy, shortmonitoring,Jitter (ns, sdev)Expected lifetime (pulses)Energy stability (std dev/mean)Ave power stability (rms, over 4 hours)1064/532/355/266nm Transverse modeCooling method
UV-DP-266-B266 nm1~1500 mW–––<0.2 nm<0.5%Near TEM00<3.0<10WCH-58010-35DC-1kHz; TTL and Analog optional12V/ 25A>10000–––––––––––––––––––––––––––––––––Datasheet
FL-266-PS266 nm1~10 mW0.02~0.5 nJ20-50 MHz<10 ps––––<15–15-35–12V/11.5A>10000<5%, <3%Pulse duration (ps) / <10<2>15 Horizontal (Vertical optional)60Air cooledForth harmonic––––––––––––––––––––––––––Datasheet
FL-266-Pico266 nm1~50 mW0.05~500 nJ100 kHz-20 MHz50-900 ps (fixed)––––<15–15-35–12V/11.5A>10000<5%, <3%–<2>15 Horizontal (Vertical optional)–Air cooledForth harmonic60–––––––––––––––––––––––––Datasheet
FL-266-Nano266 nm1~50 mW1~500 nJ100 kHz-1 MHz0.5-50 ns (fixed)––––<15–15-35–12V/11.5A–<5%, <3%–<1.8>15 Horizontal (Vertical optional)60Air cooledForth harmonic––––––––––––––––––––––––––Datasheet
MPL-Q-266266 nm1~30 mW0.1~3 uJ3-12 kHz~1.3 ns––Near TEM00–<5–10-35––>10000––<2–––––<5%, <3%~1.0>50:1, Horizontal (Vertical optional)PSU-Q-FDA/PSU-Q-LED–––––––––––––––––––––Datasheet
MPL-Q1-266266 nm10 mW10 uJ1 kHz~1 ns–––––––––––––––––––––––––––––––––––––––––––Datasheet
MPL-FN-266266 nm1~15 mW1~8 uJ10 Hz-3 kHz~0.6 ns––Near TEM00–<5–10-35––>10000––<2.0–––––<5%, <3%, <2%~1.5–PSU-SR~6.0––––––––––––––––––––Datasheet
MPL-S-266-LP266 nm1~15 mW1~15 uJ1 Hz-1 kHz~0.4 ns––Near TEM00–<5–10-35––>10000––––––––<5%, <3%, <2%~2.0–PSU-S-LP<8––––––––––––––––––––Datasheet
MPL-S-266-HP266 nm6~100 mW1~80 uJ10 Hz-100 kHz~0.4 ns––Near TEM00–<5–10-35––>10000––––––––<5%, <3%~1.5–PSU-S-HP–––––––––––––––––––––Datasheet
AO-S-266266 nm1~10 mW1~5 uJ1 Hz-5 kHz~4 ns––TEM00–––10-35––>10000––––––––<5%, <3%–>100:1, Horizontal (Vertical optional)PSU-AOM-DL–~1.0–––––––––––––––––––Datasheet
AO-S-266-H266 nm1~20 mW1~20 uJ1 Hz-1 kHz~9 ns––TEM00–––10-35––>10000––––––––<5%, <3%–>100:1, Horizontal (Vertical optional)PSU-AOM-DL–~1.0–––––––––––––––––––Datasheet
AO-Mini-E-266266 nm1~30 mW1~12 uJ1 Hz-10 kHz~8 ns @2.5 kHz––TEM00–<10–10-35–12V/29A>10000––<1.2––Air cooled––––>100:1 Horizontal–<3–<3%, <2%, <1%––––––––––––––––––Datasheet
AO-266A266 nm100~200 mW4~7 uJ20-200 kHz~10 ns @30 kHz––TEM00–<10–10-35–12V/25A>10000––<1.2––Air cooled––––>100:1 Horizontal–<3.5–<2%,<1%––––––––––––––––––Datasheet
AO-U-266266 nm200~400 mW60~80 uJ1-10 kHz~15 ns @3 kHz––TEM00–<10–10-35––>10000––<1.2––Air cooled––––>100:1 Horizontal–~3.5–<3%, <2%,<1%12V/25A–––––––––––––––––Datasheet
AO-266W266 nm500~2000 mW10-15 uJ50-200 kHz~10 ns @50 kHz––TEM00–<10–10-35–24V/13A (AO-266W-I) / 30V/18.6A (AO-266W-II)>10000––<1.2––Water cooled––––>100:1 Horizontal–<1.5–<3%, <2%, <1%––––––––––––––––––Datasheet
AO-266W-HE266 nm1000 mW100 uJ10 kHz~12 ns––TEM00–<10–10-35–24V/20.9A>10000––<1.2––Water cooled––––>100:1 Horizontal–<1.5–<3%, <2%, <1%––––––––––––––––––Datasheet
AO-U-532& 266266 nm1~3 W & 200~400500~1000 uJ & 60~80 uJ1-10 kHz~10 ns @3 kHz––––<10––––>10000––<1.2––Air cooled––––>100:1 VerticalPSU-AOM<4.5–<2%, <1%–10-35––––––––––––––––Datasheet
EO-S-266-RS266 nm1~50 mW1~40 uJ10 Hz-10 kHz~1.3 ns––Near TEM00–<10–10-35––>10000––––––––<5%, <3%––PSU-EOM-DL/PSU-EOM-L (optional)5–~1.5–––<0.2 (Ext)–––––––––––––––Datasheet
EO-266W266 nm3000 mW60 uJ10-100 kHz<5 ns––TEM00–<10–15-35–24V/31.1A>10000–––––Water cooled––––>100:1 Vertical–<1.5–<2%, <1%––––––––––––––––––Datasheet
EO-266-G266 nm100~500 mW4~100 uJ1 Hz-25 kHz<9 ns @1 kHz––––<15–15-30–––<5%, <3%––––Air cooled or water cooled––––––<3–––––<20~1PSU-EO-G (24V/13A)––––––––––––Datasheet
EO-266-Subnano266 nm1~100 mW1~100 uJ1-5 kHz<2 ns @1 kHz––––<15–15-30–––<5%, <3%––––Air cooled––––––<5mrad––––––––diode / pumped / all / solidPSU-EO-Subnano––––––––––Datasheet
EO-266-N266 nm100~500 mW4~150 uJ1 Hz-25 kHz<5 ns @1 kHz––––<15–15-30–––<5%, <3%––––Air cooled or water cooled––––––<3–––––<20~1PSU-EO-N (24V/13A)––Rep. rate / 1Hz-1kHz / 1-7kHz / 1-25kHz / 1-3kHz2energy, / short / pulse––––––––Datasheet
EO-266-P-Subnano266 nm2~220 mW1~110 uJ500 Hz-2 kHz (optional)<1 ns––TEM00–––15-30––––––––Air cooled–––––––––––––~3–diode / pumped / all / solidPSU-EO-P-Subnano––M2 / ≤1.5Warm-up time (minutes) / <15––––––Datasheet
EO-266-Subnano -Hi266 nm1~2.5 W1~500 uJ100 Hz-10 kHz< 1.5 ns @5 kHz ~2 ns @5 kHz––––<15–15-30–24V/21A>10000–––––Air cooled or water cooled––––––≤3mrad––––––~1.5mm–––Power stability (rms, 4 hours ±3℃) / <5%–––––––––Datasheet
DPS-266-Neoma266 nm100-300 mW1~3 mJ1-100 Hz ( Adjustable )<12 ns––––<15–15-35–48V/7.3A––––––Air cooled––––––≤7––––––~3.5×3.5–diode / pumped / all / solid / state–––––<1ns (Int.)109––––Datasheet
DPS-266-Q266 nm200-500 mW2~5 mJ1-100 Hz ( Adjustable )<10 ns––––<15–15-30––––––––Water cooled––––––<3––––––~2 / ~2.5––PSU-DPS-Q–energy, / short / pulse––<1ns (Int.)109<5%–––Datasheet
DPS-266-Pico266 nm100~500 mW10~100 nJ5 MHz<50 ps, 50-900––––<15–15-30––>10000<5%, <3%––––Air cooled––––––<3––––––––diode / pumped / all / solidPSU-DPS-Pico––––––––––Datasheet
PS-D-266-Air266 nm1~100 mW1~12 uJ1 kHz-10 MHz~10 ps––––≥30–––24V/20.9A–––<1.2–––––––––<3–––––––––––––––––<3%,<2%, <1%TEM00Air cooledDatasheet
PS-D-266266 nm1~5 W0.1~4 uJ400 kHz-1 MHz~10 ps––TEM00–≥30–20-30–36V/40A>10000––<1.2 / <1.3–––––––>100:1 Horizontal (Vertical optional)–<2–<3%, <2%, <1%–––––––––––––––––Water cooledDatasheet
UV-DP-266-A266 nm1~50 mW–––<0.2 nm<1%TEM00–<10WCH-58010-35––>10000––––––––––>100:1, Vertical (Horizontal optional)PSU-SF–––––––––––––––––––––Datasheet
UV-DP-266-C266 nm500~1500 mW–––<0.2 nm<0.5%Near TEM00–<10WCH-58010-35–12V/ 25A>10000–––––––––––––––––––––––––––––––––Datasheet

High Energy Laser |

3 models
ModelWavelengthPulse energyRepetition ratePulse widthHigh energy diode pumped all solid stateBeam diameter (mm)Beam divergence, full angle (mrad)Cooled methodWarm-up time (minutes)Operating voltage (VDC)Operating temperature (℃)Expected lifetime (hours)Pulse duration (ns)Jitter (ns, sdev)energyExpected lifetime (pulses)
266266 nm1-100 uJ1 kHz-5 kHz–––––––––––––
EO-266-Subnano-Hi266 nm1-500 uJ100 Hz-10 kHz<1.5 ns @<5 kHzPower stability (rms, 4 hours ±3℃) / <5%~1.5mm≤3mradAir cooled or water cooled<1524V/21A15-30>10000––––Datasheet
DPS-266- Neoma266 nm1-100 mJ<12 Hz––~3.5×3.5≤7Air cooled<1548V/7.3A15-35–<12<1ns (Int.)diode / pumped / all / solid / state109Datasheet

266nm UV CW Ultraviolet Laser.

1 model
ModelWavelengthOutput / average power
MPL-Q1-266/10uJ266 nm10 mW

266nm UV Ultraviolet Laser.

1 model
ModelWavelengthOutput / average power
PS-R-266266 nm1~50 mW

Not sure which model fits?

Send the physics — wavelength, mode, power or energy, linewidth or pulse width, delivery, control and safety — and we qualify the source.