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261 nm Deep UV Lasers

Deep UV · CW, Pulsed · Datasheets & quote request

261 nm Deep UV Lasers

The 261 nm emission line operates in the Deep UV region of the optical spectrum. Our portfolio includes configurations across CW Lasers, Pulsed Lasers, supporting CW, Pulsed operation. Compare power levels, linewidth, stability, and package dimensions below.

6 models2 seriesquote after qualification

Key applications

  • Semiconductor wafer defect inspection
  • Deep-UV resonance Raman spectroscopy
  • Photolithography and photo-ablation
  • MALDI-TOF mass spectrometry
  • High-resolution UV fluorescence metrology

6 models · 2 series

261nm CW DUV Laser

5 models
ModelWavelengthOutput / average powerPulse energyRepetition ratePulse widthSpectral linewidthPower stabilityOptical noiseTransverse modeBeam diameter at the aperture (1/e2, mm)Warm-up time (minutes)Cooled method (Water Cooled)Operating temperature (℃)Operating voltage (VDC)Expected lifetime (hours)Beam divergence, full angle (mrad)Polarization ratioPointing Stability Over Temperature(μrad/°C)Operating Temperature (°C)Modulation optionCooled methodPower supply (100-240VAC)Power stability (rms, 4 hours , ±3°C)M2Beam diameter at the aperture 1/e2 (mm)
UV-DP-261-LN261 nm1~800 mW–––<0.003 nm<0.5%Noise <1%Near TEM00<3.0<10WCH-58010-3512V/ 25A>10000––––––––––Datasheet
UV-FN-261261 nm1~10 mW–––<0.2 nm<2%–TEM00<1.0––––>10000<1.2>100:1, Vertical (Horizontal optional)<810-35DC-1kHz; TTL and Analog optional–––––Datasheet
UV-DP-261-A261 nm10~100 mW–––<0.2 nm<1%–Near TEM00<3.0<10–10-35–>10000–>100:1, Vertical (Horizontal optional)–––Air CooledPSU-DP-A–––Datasheet
UV-DP-261-B261 nm100~1500 mW–––<0.2 nm<0.5%–Near TEM00<3.0<10WCH-58010-3512V/ 25A>10000––––DC-1kHz; TTL and Analog optional–––––Datasheet
AO-S-261-H261 nm1~15 mW1~15 uJ1 Hz-1 kHz~9 ns–––Near TEM00–<10–10-35–>10000––––––PSU-AOM-DL<5%, <3%, <2%<2<1.5Datasheet

261nm UV CW Ultraviolet Laser.

1 model
ModelWavelengthOutput / average power
AO-S-261-H/1-15uJ261 nm1-15 mW

Not sure which model fits?

Send the physics — wavelength, mode, power or energy, linewidth or pulse width, delivery, control and safety — and we qualify the source.