193 nm Deep UV Lasers

Deep UV · Pulsed · Datasheets & quote request

193 nm Deep UV Lasers

The 193 nm emission line operates in the Deep UV region of the optical spectrum. Our portfolio includes configurations across Pulsed Lasers, supporting Pulsed operation. Compare power levels, linewidth, stability, and package dimensions below.

1 models1 seriesquote after qualification

Key applications

Semiconductor wafer defect inspection
Deep-UV resonance Raman spectroscopy
Photolithography and photo-ablation
MALDI-TOF mass spectrometry
High-resolution UV fluorescence metrology

Other Deep UV lines in catalog (25)

Explore all 400+ wavelengths →

213 nm 223 nm 228 nm 236 nm 240 nm 244 nm 245 nm 248 nm 250 nm 257 nm 259 nm 261 nm 262 nm 263 nm 266 nm 269 nm 273 nm 275 nm 278 nm 280 nm 287 nm 289 nm 294 nm 295 nm

Popular benchmark wavelengths

266 nm 355 nm 405 nm 450 nm 488 nm 515 nm 520 nm 532 nm 561 nm 589 nm 633 nm 640 nm

1 models · 1 series

193nm UV Ultraviolet Laser.

1 model

Model	Wavelength	Output / average power	Pulse energy	Rep.rate (kHz)	Pulse duration (ns)	Ave power stability (rms, 4 hours±3℃)	Polarization ratio	Operating temperature (℃)	Power supply (100-240VAC)
VUV-193	193 nm	1~10 mW	0.1~2 uJ	5	~10	<5%, <3%	>50:1 Horizontal	10-35	RAD1PS	Datasheet

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