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213 nm Deep UV Lasers

Deep UV · Pulsed · Datasheets & quote request

213 nm Deep UV Lasers

The 213 nm emission line operates in the Deep UV region of the optical spectrum. Our portfolio includes configurations across Pulsed Lasers, supporting Pulsed operation. Compare power levels, linewidth, stability, and package dimensions below.

7 models2 seriesquote after qualification

Key applications

  • Semiconductor wafer defect inspection
  • Deep-UV resonance Raman spectroscopy
  • Photolithography and photo-ablation
  • MALDI-TOF mass spectrometry
  • High-resolution UV fluorescence metrology

7 models · 2 series

High Energy Laser |

2 models
ModelWavelengthPulse energyRepetition ratePower stabilityenergyBeam diameter (mm)Beam divergence, full angle (mrad)Cooled methodOperating voltage (VDC)Operating temperature (℃)Expected lifetime (hours)
2 13213 nm1-100 uJ100 Hz-10 kHz––––––––
EO-213-Subnano-Hi213 nm1-100 uJ100 Hz-10 kHz<5%diode / pumped / all / solid~1.5≤3Air cooled or water cooled24V/21A15-30>10000Datasheet

213nm UV Ultraviolet Laser.

5 models
ModelWavelengthOutput / average powerPulse energyPulse widthPower stability (rms)Pulse width (ps)Jitter (ns, sdev)Beam divergence, full angle (mrad)Beam diameter (mm)Rep. rateCooled methodWarm-up time (minutes)Operating temperature (℃)Power supply (110/220VAC)Power stability (rms, 4 hours , ±3°C)Beam diameter at the aperture 1/e2 (mm)Power supply (12VDC)Expected lifetime (hours)Power stability (rms, 4 hours , ±3℃)Jitter (ns, sdev) (optional)Transverse modePower supply (100-240VAC)Beam diameter at the aperture (mm)
DPS-213-Pico213 nm1~30 mW––<5%, <3%<50<1ns<3~25MHzAir cooled<1515-30PSU-DPS-Pico–––––––––Datasheet
AO-U-213-DP213 nm1~5 mW0.3 uJ–––––––Water cooled<1010-35–<5%, <3%<2.012V/25A>10000–––––Datasheet
EO-213-Subnano213 nm1~30 mW1~30 uJ<2 ns @1 kHz––––~1.5mm1-5kHzAir cooled<1515-30PSU-EO-Subnano––––<5%––––Datasheet
EO-S-213-RS213 nm1~5 mW1~5 uJ~1.5 ns @1 kHz; Ultra low jitter<0.2 ns–––––––<1010-35–<5%, <3%~1.5–>10000–<0.2 (Ext)Near TEM00PSU-EOM-DL/PSU-EOM-L (optional)5–Datasheet
MPL-S-213-HP213 nm1~50 mW0.5~20 uJ––––––––<510-35–<5%, <3%––>10000––Near TEM00PSU-S-HP~1.5Datasheet

Not sure which model fits?

Send the physics — wavelength, mode, power or energy, linewidth or pulse width, delivery, control and safety — and we qualify the source.