Carrier scanner stages
Compare 20 models below. Open a model to review its full specifications, available technical downloads and quotation options.
| Model | Active axes | Travel range(closed-loop) | Aperture | Linearity | Technical downloads |
|---|---|---|---|---|---|
| Carrier.S100.Z.C | Z | 100 μm | 80 × 80 mm | 0.0003 | |
| Carrier.S200.Z.C | Z | 200 μm | 80 × 80 mm | 0.0003 | |
| Carrier.S100/200.Z.C | Z | 200 μm | 80 × 80 mm | 0.0003 | |
| Carrier.S100.XY.C | X Y | 100 X 100 μm | 66 × 66 mm | 0.0003 | |
| Carrier.S200.XY.C | X Y | 200 X 200 μm | 66 × 66 mm | 0.0003 | |
| Carrier.S100/200.XY.C | X Y | 200 X 200 μm | 66 × 66 mm | 0.0003 | |
| Carrier.S100.XYZ.C | X Y Z | — | 66 × 66 mm | 0.0003 | |
| Carrier.S200.XYZ.C | X Y Z | — | 66 × 66 mm | 0.0003 | |
| Carrier.S300.XYZ.C | X Y Z | — | 66 × 66 mm | 0.0003 | |
| Carrier.S100/200/300.XYZ.C | X Y Z | — | 66 × 66 mm | 0.0003 | |
| Carrier.S100.ZTxTy.C | Z, θX, θY | — | 80 × 80 mm | — | |
| Carrier.S200.ZTxTy.C | Z, θX, θY | — | 80 × 80 mm | — | |
| Carrier.S100/200.ZTxTy.C | Z, θX, θY | — | 80 × 80 mm | — | |
| Carrier.S100.XYRz.C | X, Y, θZ | — | 66 × 66 mm | — | |
| Carrier.S200.XYRz.C | X, Y, θZ | — | 66 × 66 mm | — | |
| Carrier.S100.XYZTxTyRz.C | — | — | — | — | |
| Carrier.S200.XYZTxTyRz.C | — | — | — | — | |
| Carrier.SL200.XY.C | X Y | — | 77 × 65 mm | 0.03% | |
| Carrier.SL200.XYZ.C | X Y Z | — | 77 × 65 mm | 0.03% | |
| Carrier.SL200.XY/XYZ.C | X Y | — | 77 × 65 mm | 0.03% |