Zolix · Ambient Piezo Stages
Carrier.S100.XYRz.C Piezo Carrier Scanner Stage
Clear-aperture XY plus Rz scanner; 100 um XY travel with microradian rotation range; capacitive closed-loop feedback for lateral and rotational alignment.
- Travel range(X, Y, θZ)
- 100 μm, 100um, ±1 mrad
- Max. Payload (horizontal mounting)
- 5 kg
- Active axes
- X, Y, θZ
- Aperture
- 66 × 66 mm
Specifications
| Active axes | X, Y, θZ |
|---|---|
| Travel range(X, Y, θZ) | 100 μm, 100um, ±1 mrad |
| Aperture | 66 × 66 mm |
| X Y θZ Resolution(closed-loop) | 1 nm/ 1 nm/ 0.3 urad |
| X Y θZ Resolution(open loop) | 0.3 nm/ 0.3 nm/ 0.1 urad |
| Repeatability(X Y θZ) | 10 nm/ 10 nm/ 0.2 urad |
| Stiffness(X Y) | 2 N/um |
| Resonant Frequency(no load / 2.5kg) | 420/ 130 Hz |
| Max. Payload (horizontal mounting) | 5 kg |
| Sensor Type | Capacitive Sensor |
| Max Driving Voltage | 150 V |
| Controller | MC-Archimedes.N series |