Zolix MultiFields® piezoelectric stages for room temperature, from single-axis stick-slip motor stages to 6-DOF parallel-kinematic platforms and capacitive-sensor scanners with sub-nanometer resolution.

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Sensor Resolution
0.5 nm Optical
Advanced grade — 2 nm Standard
Scanner Resolution
< 1 nm Closed-Loop
Capacitive feedback
Travel Range
up to 200 mm
Long-stroke LS200.Indus
Working Environment
Air · HV · UHV · NM
2e-11 mbar, non-magnetic
Interactive Configurator
Select standard room-temperature stages, scanners, mirror actuators, or multi-axis platforms. Adjust feedback sensors, select vacuum rating options, or specify custom requirements to configure your system.

Identified Model Reference
LS35x.Lab
Specifications
We will match this configuration with Zolix room temperature piezo systems and provide the relevant pricing, STEP files, and technical solution.
Section 1
Stick-slip inertial drive single-axis stages with optical encoder feedback. Stackable to build XY, XYZ, tip/tilt, and goniometer assemblies. Compatible with HV (10⁻⁷ mbar), UHV (2 × 10⁻¹¹ mbar), and non-magnetic environments.

35 mm and 65 mm size families with optical encoder closed-loop control. Highly stackable to build multi-axis combinations. Three quality grades — Standard (2 nm), Cost-Effective (50 nm), Advanced (0.5 nm) — and 80 mm / 105 mm large-load options.
Standard
2 nm sensor
.Lab
Cost-Effective
50 nm sensor
.Lab.E
Advanced
0.5 nm sensor
.Lab.adv
Linear Motion Stages (LS · RS · GS)
| Model | Motion | Footprint | Travel / Range | Max. Load |
|---|---|---|---|---|
| LS35x.Lab | X (linear) | 35 × 35 mm | 20 mm | 500 g |
| LS35z.Lab | Z (elevation) | 35 × 35 mm | 5 mm | 300 g |
| RS35.Lab | Rz (rotary) | 35 × 35 mm | 360° endless | 300 g |
| GS35-35.Lab | Tx (gonio θ) | 35 × 35 mm | ±8°, R=35 mm | 1 kg |
| GS35-55.Lab | Ty (gonio φ) | 35 × 35 mm | ±8°, R=55 mm | 1 kg |
| LS65x.Lab | X (linear) | 65 × 65 mm | 26 mm | 2 kg |
| LS65z.Lab | Z (elevation) | 65 × 65 mm | 10 mm | 1 kg |
| RS65.Lab | Rz (rotary) | 65 × 65 mm | 360° endless | 2 kg |
| GS65-77.Lab | Tx (gonio θ) | 70 × 70 mm | ±10°, R=77 mm | 2 kg |
| GS65-97.Lab | Ty (gonio φ) | 70 × 70 mm | ±10°, R=97 mm | 2 kg |
| LS80z.Lab | Z (elevation) | 80 × 80 mm | 15 mm | 3 kg |
| LS105x.Lab | X (linear) | 105 × 105 mm | 40 mm | 5 kg |
All models available in .HV / .UHV / .NM vacuum + non-magnetic variants. Add .E (cost-effective) or .adv (advanced sensor) suffix.

Quiet motion with self-locking and nanometer resolution. Five travel-range options from 30 mm to 200 mm in a narrow 24 mm (or 36 mm) footprint — designed to drop into existing experimental setups. Optical encoder 2 nm resolution.
| Model | Travel | Footprint | Mass | Max. Load |
|---|---|---|---|---|
| L030.Indus | 30 mm | 60 × 24 × 14 mm | 110 g | 1 kg |
| L060.Indus | 60 mm | 105 × 24 × 14 mm | 174 g | 1 kg |
| L100.Indus | 100 mm | 180 × 24 × 14 mm | 388 g | 2 kg |
| L150.Indus | 150 mm | 250 × 36 × 16.5 mm | 840 g | 3 kg |
| LS200.Indus | 200 mm | 80 × 295 × 20 mm | 1050 g | 2 kg |

Tiny structure, quiet motion, self-lock, nanometer resolution. Sub-15 mm footprint stages for space-constrained setups, in-vacuum experiments, and integrating into compact optical assemblies.
X11.mini
11 × 11 × 6.5 mm
X20.mini
20 × 20 × 12 mm
Section 2
Parallel-kinematic platforms with 3 or 6 simultaneous axes, and integrated XY microscopy carriers — single stiff platform, no stacking error, programmable virtual pivot.

Multi-DoF parallel-kinematic stages with long travel range. All struts move in concert — no stacked-axis angular error. Programmable virtual pivot, optical sensor feedback, paired with the dedicated MC-Free6D controller.
| Model | Axes | Linear Travel | Angular Travel | Max. Payload |
|---|---|---|---|---|
| Free3D.ZTxTy.150 | Z + Tx + Ty | ±5 mm | ±3° / ±3° | 3 kg |
| Free6D.3-2.150 | 6-DoF | ±10 / ±10 / ±5 mm | ±10° / ±10° / ±20° | 1 kg |
| Free6D.3-2.070 | 6-DoF compact | ±5 / ±5 / ±2.5 mm | ±16° / ±13° / ±26° | 100 g |
Free3D resolution: Z 25 nm, θ 7.5 µrad. Free6D resolution: XYZ 20 nm, θ 1 µrad. Capacitive sensor feedback on each strut.

Large-aperture XY planar stages for sample positioning under inverted or upright microscopes. Compatible with standard slide holders and stackable with piezo scanners for combined coarse + fine motion.
| Model | Travel Range | Aperture | Max. Payload | Resolution |
|---|---|---|---|---|
| Carrier.L7550.XY | 75 × 50 mm | 85 × 65 mm | 2 kg | 10 nm |
| Carrier.L1010.XY | 100 × 100 mm | 120 × 120 mm | 4 kg | 10 nm |
| Carrier.L1010s.XY | 100 × 100 mm | 20×20 mm (full) / 50×50 mm (≤ 70×70 mm) | 4 kg (2 kg vacuum) | 10 nm |
Section 3
Piezo-stack-driven flexure-guided nanopositioners with direct capacitive sensor metrology, sub-nanometer closed-loop resolution, kHz-range bandwidth. Compact and clear-aperture configurations.

Three variants: S series (long travel, 100–500 µm), SD series (high dynamic, ms response, kHz bandwidth), SH series (high load, 10 kg). 1, 2, or 3 axes. Closed-loop resolution down to 0.5 nm.
S Series — Long Travel
| Model | Axes | Travel | Resolution |
|---|---|---|---|
| S100.X.C / S100.Z.C | 1 (X or Z) | 100 µm | 0.5 nm |
| S300.X.C / S300.Z.C | 1 (X or Z) | 300 µm | 0.9 nm |
| S500.X.C | 1 (X) | 500 µm | 1.5 nm |
| S100.XY.C | 2 (XY) | 100 × 100 µm | 1 nm |
| S200.XY.C | 2 (XY) | 200 × 200 µm | 1.5 nm |
| S300.XY.C / S500.XY.C | 2 (XY) | 300 / 500 µm | ~ 1.5 nm |
| S100.XYZ.C | 3 (XYZ) | 100 × 100 × 100 µm | 1 nm |
| S200.XYZ.C | 3 (XYZ) | 200 × 200 × 200 µm | 1.5 nm |
| S100.XYZ.C.P | 3 (XYZ parallel) | 100 × 100 × 100 µm | 1 nm |
SD · High Dynamic
SH · High Load
Objective-mounted piezo scanners for microscope autofocus, photon laser scanning, and Z-stacking. M25×0.75 standard objective thread, optional autofocus integration. High-load variant for heavy oil-immersion objectives.
| Model | Travel | Resonant Freq (150 g) | Resolution (Close-loop) |
|---|---|---|---|
| Carrier.OB100.C | Z 100 µm | 250 Hz | 1 nm |
| Carrier.OB200.C | Z 200 µm | 220 Hz | 3 nm |
| Carrier.OB400.C | Z 400 µm | 165 Hz | 5 nm |
| Carrier.OBHL100.C | Z 100 µm (high load) | 560 Hz | 1 nm |
| Carrier.OB200.XY.C | XY 200 × 200 µm | 300 Hz | 2 nm |


Versatile clear-aperture scanners with capacitive parallel metrology — 1 to 6 axes in a 150 × 150 mm body with 66–80 mm aperture. Three travel ranges (100 / 200 / 300 µm) covering Z, XY, XYZ, XYRz, ZTxTy, and full 6-DoF configurations.
| Configuration | 100 µm Travel | 200 µm Travel | 300 µm Travel |
|---|---|---|---|
| 1-axis Z | Carrier.S100.Z.C | Carrier.S200.Z.C | — |
| 2-axis XY | Carrier.S100.XY.C | Carrier.S200.XY.C | — |
| 3-axis XYZ | Carrier.S100.XYZ.C | Carrier.S200.XYZ.C | Carrier.S300.XYZ.C |
| 3-axis XY + Rz | Carrier.S100.XYRz.C (±1 mrad) | Carrier.S200.XYRz.C (±2 mrad) | — |
| 3-axis Z + Tx Ty | Carrier.S100.ZTxTy.C (±1 mrad) | Carrier.S200.ZTxTy.C (±2 mrad) | — |
| 6-axis XYZ + TxTyRz | Carrier.S100.XYZTxTyRz.C | Carrier.S200.XYZTxTyRz.C | — |
5 kg payload, ≤ 0.03 % linearity, 10 nm repeatability across the family. 66 × 66 mm to 80 × 80 mm clear aperture depending on motion direction.

Large 77 × 65 mm clear aperture with low 19.5 mm profile — designed to stack on Carrier.L7550 microscopy stages. 200 × 200 µm or 200 × 200 × 200 µm travel, 500 g payload, 2 nm resolution.
Carrier.SL200.XY.C — 200 × 200 µm XY
Carrier.SL200.XYZ.C — 200 × 200 × 200 µm XYZ

Combined Microscopy Stack
Typical microscopy stack combining coarse + fine motion in three stages:

Section 4
Fast steering mirrors with strain-gauge sensor feedback, and piezo-driven motorized mirror mount actuators that retrofit onto standard 1″ / 2″ mirror mounts.

Dynamic, robust, compact beam-steering platforms. SGS strain-gauge closed-loop control with ms response, sub-µrad resolution, kHz bandwidth. Z-only (piston), 2-axis tip/tilt, and tripod 3-axis configurations.
| Model | Motion | Travel (Close-loop) | Resonant Freq. |
|---|---|---|---|
| Mirrors.Z12 | Z (piston) | 12 µm | 4 kHz |
| Mirrors.TxTy.0303 | Tx + Ty (short) | ±1.5 mrad / ±1.5 mrad | 2 kHz |
| Mirrors.TxTy.1010 | Tx + Ty (mid) | ±5 mrad / ±5 mrad | 1 kHz |
| Mirrors.Z12TxTy0101 | Z + Tx + Ty (tripod) | 12 µm + ±1 mrad × 2 | 5.5 kHz |
All Mirrors series available in .NM (non-magnetic), .HV, and .UHV variants. Controllers: MC-Archimedes.N (closed-loop, multi-channel).

Piezo screw actuators that retrofit onto standard kinematic mirror mounts (1″ and 2″ optics). Two variants: AutoScrew.LR for long-stroke 10 mm coarse motion, AutoScrew.Nano for sub-nm dynamic tuning. Both self-locking.
AutoScrew.LR · Long Stroke
10 mm travel
.Set.01 — 1″ optic, ±4°
.Set.02 — 2″ optic, ±3°
AutoScrew.Nano · Dynamic
18 µm travel
.Set.01 — 1″ optic, 0.5 mrad
.Set.02 — 2″ optic, 0.3 mrad
Four dedicated controller families, one per stage class. All support LabVIEW, C++, Python via PC GUI / SDK.

For Lab, Indus, Mini, and Carrier piezo motor stages. Open-loop + closed-loop with optical encoder. Hardware trigger, analog input, USB / EtherNet / RS485.
Modular rack — up to 10 channels
Modular design — stack 1 to 10 channels in a single chassis. Same control features as MC-Newton.S plus EtherCAT (on request). For multi-axis Lab / Carrier / Indus assemblies.
6-channel hexapod controller
Dedicated 6-channel controller for FreeXD series parallel-kinematic stages. Parallel kinematic algorithm, 3D module simulation, trajectory distribution, user-defined virtual pivot.
N ≤ 8 channels modular FPGA
For S / SD / SH / Carrier.OB / Carrier.S / Carrier.SL / Mirrors scanner series. FPGA architecture, fully digital process, digital linearization. Capacitive or strain gauge sensor input.
Cost-effective 4-channel open-loop stepping controller for AutoScrew.LR and AutoScrew.Nano mirror-mount actuators. USB interface, ASCII command set, manual front-panel control.
120 V
Driving
2 kHz
Frequency
4 ch
Channels
USB
Interface
Custom Configurations
Our engineers spec multi-axis stacks, design adapter plates between Lab / Carrier / Scanner platforms, and integrate the full motion + control + cabling solution. In-person consultation in the Netherlands.