Ambient PiezoStages @ 300K
Zolix MultiFields® piezoelectric stages for room temperature, from single-axis stick-slip motor stages to 6-DOF parallel-kinematic platforms and capacitive-sensor scanners with sub-nanometer resolution.
Sensor Resolution
0.5 nm Optical
Advanced grade — 2 nm Standard
Scanner Resolution
< 1 nm Closed-Loop
Capacitive feedback
Travel Range
up to 200 mm
Long-stroke LS200.Indus
Working Environment
Air · HV · UHV · NM
2e-11 mbar, non-magnetic
Interactive Configurator
Ambient Piezo Stages Configurator
Select standard room-temperature stages, scanners, mirror actuators, or multi-axis platforms. Adjust feedback sensors, select vacuum rating options, or specify custom requirements to configure your system.
LS35x.Lab Linear Piezo Stage (X)
Identified Model Reference
LS35x.Lab
Specifications
- Footprint: 35 x 35 mm
- Travel: 20 mm
- Max payload: 500 g
- Sensor: 2 nm (Standard)
- Environment: Standard Room Air (300K)
Why choose this
Piezo-motor stage with 2 nm optical-encoder feedback — the choice for nanometre-repeatable positioning with real travel in a lab footprint.
We will match this configuration with Zolix room temperature piezo systems and provide the relevant STEP files and technical solution.
Section 1
Piezo Motor Positioning
Stick-slip inertial drive single-axis stages with optical encoder feedback. Stackable to build XY, XYZ, tip/tilt, and goniometer assemblies. Compatible with HV (10⁻⁷ mbar), UHV (2 × 10⁻¹¹ mbar), and non-magnetic environments.
Balance of Speed, Load and Size
35 mm and 65 mm size families with optical encoder closed-loop control. Highly stackable to build multi-axis combinations. Three quality grades — Standard (2 nm), Cost-Effective (50 nm), Advanced (0.5 nm) — and 80 mm / 105 mm large-load options.
Standard
2 nm sensor
.Lab
Cost-Effective
50 nm sensor
.Lab.E
Advanced
0.5 nm sensor
.Lab.adv
Linear Motion Stages (LS · RS · GS)
| Model | Motion | Footprint | Travel / Range | Max. Load |
|---|---|---|---|---|
| LS35x.Lab | X (linear) | 35 × 35 mm | 20 mm | 500 g |
| LS35z.Lab | Z (elevation) | 35 × 35 mm | 5 mm | 300 g |
| RS35.Lab | Rz (rotary) | 35 × 35 mm | 360° endless | 300 g |
| GS35-35.Lab | Tx (gonio θ) | 35 × 35 mm | ±8°, R=35 mm | 1 kg |
| GS35-55.Lab | Ty (gonio φ) | 35 × 35 mm | ±8°, R=55 mm | 1 kg |
| LS65x.Lab | X (linear) | 65 × 65 mm | 26 mm | 2 kg |
| LS65z.Lab | Z (elevation) | 65 × 65 mm | 10 mm | 1 kg |
| RS65.Lab | Rz (rotary) | 65 × 65 mm | 360° endless | 2 kg |
| GS65-77.Lab | Tx (gonio θ) | 70 × 70 mm | ±10°, R=77 mm | 2 kg |
| GS65-97.Lab | Ty (gonio φ) | 70 × 70 mm | ±10°, R=97 mm | 2 kg |
| LS80z.Lab | Z (elevation) | 80 × 80 mm | 15 mm | 3 kg |
| LS105x.Lab | X (linear) | 105 × 105 mm | 40 mm | 5 kg |
All models available in .HV / .UHV / .NM vacuum + non-magnetic variants. Add .E (cost-effective) or .adv (advanced sensor) suffix.
Easy Integration · Long Travel
Quiet motion with self-locking and nanometer resolution. Five travel-range options from 30 mm to 200 mm in a narrow 24 mm (or 36 mm) footprint — designed to drop into existing experimental setups. Optical encoder 2 nm resolution.
| Model | Travel | Footprint | Mass | Max. Load |
|---|---|---|---|---|
| L030.Indus | 30 mm | 60 × 24 × 14 mm | 110 g | 1 kg |
| L060.Indus | 60 mm | 105 × 24 × 14 mm | 174 g | 1 kg |
| L100.Indus | 100 mm | 180 × 24 × 14 mm | 388 g | 2 kg |
| L150.Indus | 150 mm | 250 × 36 × 16.5 mm | 840 g | 3 kg |
| LS200.Indus | 200 mm | 80 × 295 × 20 mm | 1050 g | 2 kg |
Ultra Compact Nanopositioners
Tiny structure, quiet motion, self-lock, nanometer resolution. Sub-15 mm footprint stages for space-constrained setups, in-vacuum experiments, and integrating into compact optical assemblies.
X11.mini
11 × 11 × 6.5 mm
- Travel
- 6 mm
- Resolution
- < 1 nm
- Max. Payload
- 50 g
- Mass
- 10 g
X20.mini
20 × 20 × 12 mm
- Travel
- 10 mm
- Resolution
- 2 nm
- Max. Payload
- 300 g (H) / 100 g (V)
- Mass
- 30 g
Section 2
Multi Degrees of Freedom
Parallel-kinematic platforms with 3 or 6 simultaneous axes, and integrated XY microscopy carriers — single stiff platform, no stacking error, programmable virtual pivot.
Parallel Kinematic Platforms
Multi-DoF parallel-kinematic stages with long travel range. All struts move in concert — no stacked-axis angular error. Programmable virtual pivot, optical sensor feedback, paired with the dedicated MC-Free6D controller.
| Model | Axes | Linear Travel | Angular Travel | Max. Payload |
|---|---|---|---|---|
| Free3D.ZTxTy.150 | Z + Tx + Ty | ±5 mm | ±3° / ±3° | 3 kg |
| Free6D.3-2.150 | 6-DoF | ±10 / ±10 / ±5 mm | ±10° / ±10° / ±20° | 1 kg |
| Free6D.3-2.070 | 6-DoF compact | ±5 / ±5 / ±2.5 mm | ±16° / ±13° / ±26° | 100 g |
Free3D resolution: Z 25 nm, θ 7.5 µrad. Free6D resolution: XYZ 20 nm, θ 1 µrad. Capacitive sensor feedback on each strut.
Microscopy XY Carriers (mm-range)
Large-aperture XY planar stages for sample positioning under inverted or upright microscopes. Compatible with standard slide holders and stackable with piezo scanners for combined coarse + fine motion.
| Model | Travel Range | Aperture | Max. Payload | Resolution |
|---|---|---|---|---|
| Carrier.L7550.XY | 75 × 50 mm | 85 × 65 mm | 2 kg | 10 nm |
| Carrier.L1010.XY | 100 × 100 mm | 120 × 120 mm | 4 kg | 10 nm |
| Carrier.L1010s.XY | 100 × 100 mm | 20×20 mm (full) / 50×50 mm (≤ 70×70 mm) | 4 kg (2 kg vacuum) | 10 nm |
Section 3
Piezo Scanners (Capacitive Sensor)
Piezo-stack-driven flexure-guided nanopositioners with direct capacitive sensor metrology, sub-nanometer closed-loop resolution, kHz-range bandwidth. Compact and clear-aperture configurations.
Compact Capacitive Scanners
Three variants: S series (long travel, 100–500 µm), SD series (high dynamic, ms response, kHz bandwidth), SH series (high load, 10 kg). 1, 2, or 3 axes. Closed-loop resolution down to 0.5 nm.
S Series — Long Travel
| Model | Axes | Travel | Resolution |
|---|---|---|---|
| S100.X.C / S100.Z.C | 1 (X or Z) | 100 µm | 0.5 nm |
| S300.X.C / S300.Z.C | 1 (X or Z) | 300 µm | 0.9 nm |
| S500.X.C | 1 (X) | 500 µm | 1.5 nm |
| S100.XY.C | 2 (XY) | 100 × 100 µm | 1 nm |
| S200.XY.C | 2 (XY) | 200 × 200 µm | 1.5 nm |
| S300.XY.C / S500.XY.C | 2 (XY) | 300 / 500 µm | ~ 1.5 nm |
| S100.XYZ.C | 3 (XYZ) | 100 × 100 × 100 µm | 1 nm |
| S200.XYZ.C | 3 (XYZ) | 200 × 200 × 200 µm | 1.5 nm |
| S100.XYZ.C.P | 3 (XYZ parallel) | 100 × 100 × 100 µm | 1 nm |
SD · High Dynamic
- SD15.X.C — 15 µm, 3.3 kHz
- SD30.X.C — 30 µm, 2.2 kHz
- ms response time, 28 N/µm stiffness
SH · High Load
- SH30.XYZ.C — 30×30×15 µm, 10 kg
- 160 × 160 mm footprint, 500 Hz bandwidth
Objective Z & XY Scanners
Objective-mounted piezo scanners for microscope autofocus, photon laser scanning, and Z-stacking. M25×0.75 standard objective thread, optional autofocus integration. High-load variant for heavy oil-immersion objectives.
| Model | Travel | Resonant Freq (150 g) | Resolution (Close-loop) |
|---|---|---|---|
| Carrier.OB100.C | Z 100 µm | 250 Hz | 1 nm |
| Carrier.OB200.C | Z 200 µm | 220 Hz | 3 nm |
| Carrier.OB400.C | Z 400 µm | 165 Hz | 5 nm |
| Carrier.OBHL100.C | Z 100 µm (high load) | 560 Hz | 1 nm |
| Carrier.OB200.XY.C | XY 200 × 200 µm | 300 Hz | 2 nm |
Objective Scanner Use Cases
- Z-stacking & autofocus on inverted microscopes
- Photon laser scanning (confocal / multi-photon)
- XY beam scanning behind objective
- High-throughput slide imaging
- Sub-nm focus stability for super-resolution
Clear-Aperture Multi-DoF Scanners
Versatile clear-aperture scanners with capacitive parallel metrology — 1 to 6 axes in a 150 × 150 mm body with 66–80 mm aperture. Three travel ranges (100 / 200 / 300 µm) covering Z, XY, XYZ, XYRz, ZTxTy, and full 6-DoF configurations.
| Configuration | 100 µm Travel | 200 µm Travel | 300 µm Travel |
|---|---|---|---|
| 1-axis Z | Carrier.S100.Z.C | Carrier.S200.Z.C | — |
| 2-axis XY | Carrier.S100.XY.C | Carrier.S200.XY.C | — |
| 3-axis XYZ | Carrier.S100.XYZ.C | Carrier.S200.XYZ.C | Carrier.S300.XYZ.C |
| 3-axis XY + Rz | Carrier.S100.XYRz.C (±1 mrad) | Carrier.S200.XYRz.C (±2 mrad) | — |
| 3-axis Z + Tx Ty | Carrier.S100.ZTxTy.C (±1 mrad) | Carrier.S200.ZTxTy.C (±2 mrad) | — |
| 6-axis XYZ + TxTyRz | Carrier.S100.XYZTxTyRz.C | Carrier.S200.XYZTxTyRz.C | — |
5 kg payload, ≤ 0.03 % linearity, 10 nm repeatability across the family. 66 × 66 mm to 80 × 80 mm clear aperture depending on motion direction.
Low-Profile Large-Aperture
Large 77 × 65 mm clear aperture with low 19.5 mm profile — designed to stack on Carrier.L7550 microscopy stages. 200 × 200 µm or 200 × 200 × 200 µm travel, 500 g payload, 2 nm resolution.
Carrier.SL200.XY.C — 200 × 200 µm XY
Carrier.SL200.XYZ.C — 200 × 200 × 200 µm XYZ
Combined Microscopy Stack
Sample · Focus · Scan
Typical microscopy stack combining coarse + fine motion in three stages:
- Carrier.L1010s.XY — coarse
- Carrier.SL200.XYZ.C — scan
- Carrier.OB400.C — focus
Section 4
Optics Automation
Fast steering mirrors with strain-gauge sensor feedback, and piezo-driven motorized mirror mount actuators that retrofit onto standard 1″ / 2″ mirror mounts.
Piezo Fast Steering Mirrors
Dynamic, robust, compact beam-steering platforms. SGS strain-gauge closed-loop control with ms response, sub-µrad resolution, kHz bandwidth. Z-only (piston), 2-axis tip/tilt, and tripod 3-axis configurations.
| Model | Motion | Travel (Close-loop) | Resonant Freq. |
|---|---|---|---|
| Mirrors.Z12 | Z (piston) | 12 µm | 4 kHz |
| Mirrors.TxTy.0303 | Tx + Ty (short) | ±1.5 mrad / ±1.5 mrad | 2 kHz |
| Mirrors.TxTy.1010 | Tx + Ty (mid) | ±5 mrad / ±5 mrad | 1 kHz |
| Mirrors.Z12TxTy0101 | Z + Tx + Ty (tripod) | 12 µm + ±1 mrad × 2 | 5.5 kHz |
All Mirrors series available in .NM (non-magnetic), .HV, and .UHV variants. Controllers: MC-Archimedes.N (closed-loop, multi-channel).
Piezo Motorized Mirror Mount Actuators
Piezo screw actuators that retrofit onto standard kinematic mirror mounts (1″ and 2″ optics). Two variants: AutoScrew.LR for long-stroke 10 mm coarse motion, AutoScrew.Nano for sub-nm dynamic tuning. Both self-locking.
AutoScrew.LR · Long Stroke
10 mm travel
- Min. Motion
- 20 nm
- Max. Output
- 20 N (up to 50 N)
- Holding Force
- 100 N
- Velocity
- 2 mm/min
.Set.01 — 1″ optic, ±4°
.Set.02 — 2″ optic, ±3°
AutoScrew.Nano · Dynamic
18 µm travel
- Resolution
- 1 nm
- Max. Output
- 300 N
- Driving V
- 0 – 120 V
- Mass
- 9.5 g
.Set.01 — 1″ optic, 0.5 mrad
.Set.02 — 2″ optic, 0.3 mrad
Piezo Controllers
Four dedicated controller families, one per stage class. All support LabVIEW, C++, Python via PC GUI / SDK.
Single-Channel Piezo Motor
For Lab, Indus, Mini, and Carrier piezo motor stages. Open-loop + closed-loop with optical encoder. Hardware trigger, analog input, USB / EtherNet / RS485.
- • 0 – 75 V output · 30 W max
- • 136 × 131 × 32 mm, IEC inlet
- • PC GUI + SDK · hardware trigger SMA/TTL
Modular rack — up to 10 channels
Modular Multi-Channel
Modular design — stack 1 to 10 channels in a single chassis. Same control features as MC-Newton.S plus EtherCAT (on request). For multi-axis Lab / Carrier / Indus assemblies.
- • 30 W per channel · 100 W total
- • USB · EtherNet · RS485 · EtherCAT
- • 136 × 131 × (32 × (x+1)) mm
6-channel hexapod controller
6-DOF Hexapod Controller
Dedicated 6-channel controller for FreeXD series parallel-kinematic stages. Parallel kinematic algorithm, 3D module simulation, trajectory distribution, user-defined virtual pivot.
- • 6 channels · 200 × 200 × 140 mm
- • DB15 × 6 · USB-C / EtherNet / EtherCAT
- • 20 kHz max frequency · 100 W output
N ≤ 8 channels modular FPGA
Piezo Scanner Controller
For S / SD / SH / Carrier.OB / Carrier.S / Carrier.SL / Mirrors scanner series. FPGA architecture, fully digital process, digital linearization. Capacitive or strain gauge sensor input.
- • N channels (N ≤ 8) · 20 / 50 kHz sample rate
- • −20 to 150 V output · 24 W per channel
- • Hardware trigger · USB / EtherNet
Piezo Screw Actuator Controller — 4 Channels
Cost-effective 4-channel open-loop stepping controller for AutoScrew.LR and AutoScrew.Nano mirror-mount actuators. USB interface, ASCII command set, manual front-panel control.
120 V
Driving
2 kHz
Frequency
4 ch
Channels
USB
Interface
Custom Configurations
Multi-axis assemblies, custom adapter plates
Our engineers spec multi-axis stacks, design adapter plates between Lab / Carrier / Scanner platforms, and integrate the full motion + control + cabling solution. In-person consultation in the Netherlands.