Zolix · Ambient Piezo Stages
Carrier.S100/200.ZTxTy.C Piezo Carrier Scanner Stage
Clear-aperture Z plus tip/tilt scanner; 100 um or 200 um Z travel with matched microradian tilt range; capacitive closed-loop feedback for active focus and angular alignment.
- Travel range(Z, θX, θY)
- 200 μm, ±2 mrad, ±2 mrad
- Max. Payload (horizontal mounting)
- 5 kg
- Active axes
- Z, θX, θY
- Aperture
- 80 × 80 mm
Specifications
| Active axes | Z, θX, θY |
|---|---|
| Travel range(Z, θX, θY) | 200 μm, ±2 mrad, ±2 mrad |
| Aperture | 80 × 80 mm |
| Z Linearity | 0.0003 |
| θ Linearity | 0.0015 |
| Z Resolution(closed-loop/ open loop) | 1.5 nm/ 0.7 nm |
| θ Resolution(closed-loop/ open loop) | 0.1 urad/0.06 urad |
| Repeatability(Z/ θ) | 10 nm/ ±0.1 urad |
| Stiffness | 1.5 N/um |
| Z Resonant Frequency(no load / 2.5kg) | 350/ 125 Hz |
| θ Resonant Frequency(no load / 2.5kg) | 370/ 110 Hz |
| Max. Payload (horizontal mounting) | 5 kg |
| Sensor Type | Capacitive Sensor |
| Max Driving Voltage | 150 V |
| Controller | MC-Archimedes.N series |