Zolix · Ambient Piezo Stages
Carrier.SL200.XY/XYZ.C Piezo Carrier Scanner Stage
Low-profile clear-aperture scanner family; XY or XYZ 200 um travel configurations; 77 x 65 mm aperture; 19.5 mm height; 500 g payload; 2 nm closed-loop resolution; capacitive feedback.
- Travel range
- 200 × 200 μm
- Max. Payload
- 500 g
- Active axes
- X Y
- Footprint × Height
- 182 × 150 × 19.5 mm
Specifications
| Active axes | X Y |
|---|---|
| Footprint × Height | 182 × 150 × 19.5 mm |
| Material | Aluminum, Stainless Steel |
| Travel range | 200 × 200 μm |
| Aperture | 77 × 65 mm |
| Resolution | 2 nm |
| Repeatability | 10 nm |
| Linearity | 0.03% |
| Max. Payload | 500 g |
| Sensor Type | Capacitive Sensor |
| Driving Voltage | Max. 150 V |
| Working Temperature | 15 ~ 40 °C |
| Combination | Compatible with Carrier.L7550.XY |
| Controller | MC-Archimedes.N |