Zolix · Ambient Piezo Stages
Carrier.S100.XYZ.C Piezo Carrier Scanner Stage
Clear-aperture XYZ scanner stage; 100 um travel per linear axis; 5 kg maximum payload; capacitive closed-loop feedback for focus and lateral sample scanning.
- Travel range
- 100 X 100 X 100 μm
- Max. Payload (horizontal mounting)
- 5 kg
- Active axes
- X Y Z
- Aperture
- 66 × 66 mm
Specifications
| Active axes | X Y Z |
|---|---|
| Travel range | 100 X 100 X 100 μm |
| Aperture | 66 × 66 mm |
| Resolution(closed-loop) | 1 nm |
| Resolution(open-loop) | 0.3 nm |
| Repeatability | 10 nm |
| Linearity | 0.0003 |
| Crosstalk(Z-XY) | ±30 nm |
| Resonant Frequency(X Y Z no load) | 180/ 180/ 390 Hz |
| Resonant Frequency(X Y Z 350g) | 150/ 150/ 250 Hz |
| Max. Payload (horizontal mounting) | 5 kg |
| Sensor Type | Capacitive Sensor |
| Max Driving Voltage | 150 V |
| Controller | MC-Archimedes.N series |