Zolix · Ambient Piezo Stages
Carrier.S100/200.Z.C Piezo Carrier Scanner Stage
Clear-aperture Z scanner stage; 100 um or 200 um Z travel; 5 kg maximum payload; capacitive closed-loop feedback for microscope sample carriers.
- Travel range(closed-loop)
- 200 μm
- Max. Payload (horizontal mounting)
- 5 kg
- Active axes
- Z
- Aperture
- 80 × 80 mm
Specifications
| Active axes | Z |
|---|---|
| Travel range(closed-loop) | 200 μm |
| Aperture | 80 × 80 mm |
| Linearity | 0.0003 |
| Pitch / Yaw | ±50 urad |
| Roll | ±10 urad |
| Resolution(closed-loop) | 1 nm |
| Resolution(open-loop) | 0.3 nm |
| Repeatability | 10 nm |
| Stiffness | 1.7 N/um |
| Resonant Frequency(no load / 2.5kg) | 350/ 120 Hz |
| Max. Payload (horizontal mounting) | 5 kg |
| Sensor Type | Capacitive Sensor |
| Max Driving Voltage | 150 V |
| Controller | MC-Archimedes.N series |