Zolix · Ambient Piezo Stages
Carrier.S100.XY.C Piezo Carrier Scanner Stage
Clear-aperture XY scanner stage; 100 um travel per axis; 5 kg maximum payload; capacitive closed-loop feedback for sample scanning around an open optical path.
- Travel range(closed-loop)
- 100 X 100 μm
- Max. Payload (horizontal mounting)
- 5 kg
- Active axes
- X Y
- Aperture
- 66 × 66 mm
Specifications
| Active axes | X Y |
|---|---|
| Travel range(closed-loop) | 100 X 100 μm |
| Aperture | 66 × 66 mm |
| Linearity | 0.0003 |
| Resolution(closed-loop) | 1 nm |
| Resolution(open-loop) | 0.2 nm |
| Repeatability | 10 nm |
| Stiffness | 2 N/um |
| Resonant Frequency(no load / 2.5kg) | 420/ 130 Hz |
| Max. Payload (horizontal mounting) | 5 kg |
| Sensor Type | Capacitive Sensor |
| Max Driving Voltage | 150 V |
| Controller | MC-Archimedes.N series |