Closed-loop raster scanning
Capacitive feedback linearises the scan, removing the hysteresis that distorts open-loop images.

Opto-Mechanics · Ambient Piezo Stages - Standard scanner modules
Standard flexure-guided XYZ-axis piezo scanner; 100 x 100 x 100 um XYZ travel; capacitive closed-loop feedback; closed-loop resolution 0.5 nm Z / 1 nm XY. Includes .P compact parallel stack / through-aperture configuration for optical access.
Datasheet (PDF) ↗Catalog context
S100.XYZ.C.P is listed in the Ambient Piezo Stages - Standard scanner modules family. The local catalog record provides these first selection fields: Active axes: X Y Z; Mass: 200 g; Travel range(closed-loop): 100 × 100 × 100 μm.
| Active axes | X Y Z |
|---|---|
| Mass | 200 g |
| Travel range(closed-loop) | 100 × 100 × 100 μm |
| Linearity | 0.0003 |
| Resolution(closed-loop) | 1 nm |
| Repeatability (X/Y/Z) | 10 nm |
| Resonant Frequency(X/Y/Z, no load) | 700/ 700/ 700 Hz |
| Max. Payload (horizontal mounting) | 200 g |
| Sensor Type | Capacitive Sensor |
| Max Driving Voltage | 150 V |
| Controller | MC-Archimedes.N series |
Application context
Capacitive feedback linearises the scan, removing the hysteresis that distorts open-loop images.
Provide the fine XY or XYZ scan under an AFM, STM or near-field head.
Step a sample through a focus in reproducible increments so map pixels correspond to real coordinates.
System integration
Use these checks to connect S100.XYZ.C.P to the surrounding optical, mechanical and control system. Every value shown is taken from this model's own specification record.
Technical FAQ
Travel range(closed-loop): 100 × 100 × 100 μm · Resolution(closed-loop): 1 nm. Separate travel from resolution and both from repeatability. Repeatability is what an automated sequence actually depends on, and it is the figure most often absent from a headline specification.
Controller: MC-Archimedes.N series. Pair open-loop mechanics with the specified high-voltage or inertial driver, and closed-loop variants with the controller their capacitive, strain-gauge or encoder feedback requires. Matching connectors do not guarantee electrical compatibility.
Resonant Frequency(X/Y/Z, no load): 700/ 700/ 700 Hz · Max. Payload (horizontal mounting): 200 g. Check the load rating in the orientation you will use it — a vertical or cantilevered load is a moment, not a mass — and match the base to an M6 pattern on a 25 mm grid or a 1/4"-20 pattern on a 1 inch grid.
Specifying this part
The loop reserves headroom to correct within, so the usable range drops when the sensor is engaged: an S100.XY.C covers 120 × 120 µm open-loop against 100 × 100 µm closed-loop, and an S200 covers 240 × 240 against 200 × 200. Specify against the closed-loop number.
A piezo stack acting through flexure hinges with a capacitive sensor reading directly against the moving surface — no sliding contact, no backlash, and millisecond-class response.
Most of the range is orderable as .HV (high vacuum), .UHV (ultra-high vacuum) or .NM (non-magnetic). The suffix changes materials, cabling and bake compatibility rather than the mechanics, so specify it against the chamber the stage will live in.
Full series comparison, controller pairing and mounting hardware on the ambient piezo stages overview, or work through the selection with the configurator.
Model selection
Compare S100.XYZ.C.P with the closest available models in the Ambient Piezo Stages - Standard scanner modules family.
| Selection parameter | S100.XYZ.C.P (current) | S100.XYZ.C | S100.Z.C |
|---|---|---|---|
| Travel / adjustment | 100 × 100 × 100 μm | 120 × 120 × 120 μm | 120 um |
| Resolution / sensitivity | 1 nm | 0.2 nm | 0.2 nm |
| Mounting interface | 200 g | 500 g | 500 g |
S100.X.C
Standard flexure-guided X-axis piezo scanner; 100 um X-axis travel; capacitive closed-loop feedback; closed-loop resolution 0.5 nm Z / 1 nm XY.
S300.X.C
Standard flexure-guided X-axis piezo scanner; 300 um X-axis travel; capacitive closed-loop feedback; closed-loop resolution 0.9 nm Z / 1.5 nm XY.
S500.X.C
Standard flexure-guided X-axis piezo scanner; 500 um X-axis travel; capacitive closed-loop feedback; closed-loop resolution 1.5 nm class.
S100.Z.C
Standard flexure-guided Z-axis piezo scanner; 100 um Z-axis travel; capacitive closed-loop feedback; closed-loop resolution 0.5 nm Z / 1 nm XY.
Before you specify
Engineering context for choosing this class of component, with the tradeoffs worked through on real specifications.
NanopositioningDecide what to move — sample, objective or both — then turn field of view, stack depth, settling and synchronisation into stage specifications. Comparison tables, an acquisition-time calculator, three configurations and a purchasing checklist on documented objective scanners, clear-aperture XYZ stages and controllers.
Open guide
NanopositioningWhy an open-loop piezo is wrong by 15 % of its travel, how creep grows with the logarithm of hold time, what strain-gauge and capacitive feedback actually fix — and the bandwidth and sensor noise a servo costs you in return.
Open guide
NanopositioningPiezo ceramic strains by one part in a thousand, so a 20 mm stack gives 20 µm. Every stage architecture is a different way around that limit — and each one wins a different experiment.
Open guide