Opto-Mechanics · Ambient Piezo Stages - Standard scanner modules
S100.XYZ.C.P
Standard flexure-guided XYZ-axis piezo scanner; 100 x 100 x 100 um XYZ travel; capacitive closed-loop feedback; closed-loop resolution 0.5 nm Z / 1 nm XY. Includes .P compact parallel stack / through-aperture configuration for optical access.
Datasheet (PDF) ↗Specifications
| Active axes | X Y Z |
|---|---|
| Mass | 200 g |
| Travel range(closed-loop) | 100 × 100 × 100 μm |
| Linearity | 0.0003 |
| Resolution(closed-loop) | 1 nm |
| Repeatability (X/Y/Z) | 10 nm |
| Resonant Frequency(X/Y/Z, no load) | 700/ 700/ 700 Hz |
| Max. Payload (horizontal mounting) | 200 g |
| Sensor Type | Capacitive Sensor |
| Max Driving Voltage | 150 V |
| Controller | MC-Archimedes.N series |
Toepassingen
Closed-loop rasterscannen
Capacitieve terugkoppeling lineariseert de scan en verwijdert de hysterese die open-loop beelden vervormt.
Scanning-probemicroscopie
Levert de fijne XY- of XYZ-scan onder een AFM-, STM- of nabijveldkop.
Confocale en Raman-mapping
Stapt een monster reproduceerbaar door de focus, zodat mappixels met echte coördinaten overeenkomen.
Specifying this part
What this model has to survive, and what it needs around it
Closed-loop travel is shorter than open-loop travel
The loop reserves headroom to correct within, so the usable range drops when the sensor is engaged: an S100.XY.C covers 120 × 120 µm open-loop against 100 × 100 µm closed-loop, and an S200 covers 240 × 240 against 200 × 200. Specify against the closed-loop number.
Flexure guiding, capacitive sensing
A piezo stack acting through flexure hinges with a capacitive sensor reading directly against the moving surface — no sliding contact, no backlash, and millisecond-class response.
Vacuum and non-magnetic versions
Most of the range is orderable as .HV (high vacuum), .UHV (ultra-high vacuum) or .NM (non-magnetic). The suffix changes materials, cabling and bake compatibility rather than the mechanics, so specify it against the chamber the stage will live in.
Full series comparison, controller pairing and mounting hardware on the ambient piezo stages overview, or work through the selection with the configurator.
Related products
S100.X.C
Standard flexure-guided X-axis piezo scanner; 100 um X-axis travel; capacitive closed-loop feedback; closed-loop resolution 0.5 nm Z / 1 nm XY.
S300.X.C
Standard flexure-guided X-axis piezo scanner; 300 um X-axis travel; capacitive closed-loop feedback; closed-loop resolution 0.9 nm Z / 1.5 nm XY.
S500.X.C
Standard flexure-guided X-axis piezo scanner; 500 um X-axis travel; capacitive closed-loop feedback; closed-loop resolution 1.5 nm class.
S100.Z.C
Standard flexure-guided Z-axis piezo scanner; 100 um Z-axis travel; capacitive closed-loop feedback; closed-loop resolution 0.5 nm Z / 1 nm XY.
