
Opto-Mechanics · Motorized XYR Series All-In-One Three-Axis Stages
XYR200230
XYR three-axis motorized alignment platform; 200 mm x 230 mm XY class plus 360 deg rotation; translation repeatability around +/-1 um and rotation repeatability around +/-30 arcsec.
Datasheet (PDF) ↗CAD Model (RAR) ↗Specifications
| Travel range for X- and Y-axis (mm) | ±10 |
|---|---|
| Rotation angular range for θz- axis (°) | ±5 |
| Stage surface size(mm) | 200×200 |
| Base plate dimension (mm) | 230×230 |
| Overall height (mm) | 76 |
| Transmission mechanism | precision ball screw,φ8×2 |
| Guide mechanism | crossed-roller bearing guide |
| Main body material and surface treatment | Black anodized aluminum alloy |
| Weight(Kg) | 8 |
| Resolution of XY axis (step/half- step) (µm) | 10/5 |
| 20-fine-subdivison resolution of XY axis (µm) | 0.5 |
| Repositioning accuracy (um) | ≤±3 |
| Static parallelism (mm) | ≤0.04 |
| Motion parallelism(µm) | ≤20 |
| Max speed(mm/s)* | 20 |
| Motor and stepping angle(°) | 2-phase 42 stepping motor, 1.8 |
| Brand and model number of motor | Shinano,SST43D2126-10 |
| Working current(A) | 1.7 |
| Holding torque of motor (N·m) | 0.456 |
| Brand and model number of stepping driver (optional) | Moons, SR2 |
| Type of plug for stage | 1*DB9 (pin) |
| Type of connection cable | High flexibility cable (Helukabel, Germany) |
| Length of connection cable(m) | 0.2 |
| Position-limit sensors (built-in), for each axis | 2*GP1S09xHCPI (Sharp, Japan) |
| Origin-point sensors (built-in), for each axis | 1*GP1S09xHCPI (Sharp, Japan) |
| Voltage of power supply for sensors (V) | DC5~24V±10% |
| Control output | NPN open controller output DC5~24V 8mA or less Residual voltage 0.3V or less (when load current is 2mA) |
| Status of output ports | Output ON when sensor is blocked |
| Algorithms and formulas on multi- axis motion | Can be provided (Free) |
| Software for stage control and | Can be provided (Extra charge needed) |
| Horizontal direction(Kg) | 30 |
Applications
Automated scanning and mapping
Step-and-acquire across areas far wider than a single field of view.
Repeatable production indexing
Move parts between fixed stations with closed-loop encoders holding position over long shifts.
Programmable multi-axis motion
Coordinate several axes from software for processing, inspection and test sequences.
Related products
XYR150210
XYR three-axis motorized alignment platform; 150 mm x 210 mm XY class plus 360 deg rotation; translation repeatability around +/-1 um and rotation repeatability around +/-30 arcsec.
XYR300400-CH
XYR three-axis motorized alignment platform; 300 mm x 400 mm XY class plus 360 deg rotation; translation repeatability around +/-1 um and rotation repeatability around +/-30 arcsec with CH configured variant.


