Back to Home
XYR200230

Opto-Mechanics · Motorized XYR Series All-In-One Three-Axis Stages

XYR200230

XYR three-axis motorized alignment platform; 200 mm x 230 mm XY class plus 360 deg rotation; translation repeatability around +/-1 um and rotation repeatability around +/-30 arcsec.

View quote list
Datasheet (PDF) ↗CAD Model (RAR) ↗

Specifications

Travel range for X- and Y-axis (mm)±10
Rotation angular range for θz- axis (°)±5
Stage surface size(mm)200×200
Base plate dimension (mm)230×230
Overall height (mm)76
Transmission mechanismprecision ball screw,φ8×2
Guide mechanismcrossed-roller bearing guide
Main body material and surface treatmentBlack anodized aluminum alloy
Weight(Kg)8
Resolution of XY axis (step/half- step) (µm)10/5
20-fine-subdivison resolution of XY axis (µm)0.5
Repositioning accuracy (um)≤±3
Static parallelism (mm)≤0.04
Motion parallelism(µm)≤20
Max speed(mm/s)*20
Motor and stepping angle(°)2-phase 42 stepping motor, 1.8
Brand and model number of motorShinano,SST43D2126-10
Working current(A)1.7
Holding torque of motor (N·m)0.456
Brand and model number of stepping driver (optional)Moons, SR2
Type of plug for stage1*DB9 (pin)
Type of connection cableHigh flexibility cable (Helukabel, Germany)
Length of connection cable(m)0.2
Position-limit sensors (built-in), for each axis2*GP1S09xHCPI (Sharp, Japan)
Origin-point sensors (built-in), for each axis1*GP1S09xHCPI (Sharp, Japan)
Voltage of power supply for sensors (V)DC5~24V±10%
Control outputNPN open controller output DC5~24V 8mA or less Residual voltage 0.3V or less (when load current is 2mA)
Status of output portsOutput ON when sensor is blocked
Algorithms and formulas on multi- axis motionCan be provided (Free)
Software for stage control andCan be provided (Extra charge needed)
Horizontal direction(Kg)30

Toepassingen

Geautomatiseerd scannen en mappen

Step-and-acquire over gebieden die veel breder zijn dan één beeldveld.

Herhaalbaar indexeren in productie

Verplaats onderdelen tussen vaste stations met closed-loop encoders die de positie over lange ploegen vasthouden.

Programmeerbare meerassige beweging

Coördineer meerdere assen vanuit software voor bewerkings-, inspectie- en testsequenties.