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XYR150210

Opto-Mechanics · Motorized XYR Series All-In-One Three-Axis Stages

XYR150210

XYR three-axis motorized alignment platform; 150 mm x 210 mm XY class plus 360 deg rotation; translation repeatability around +/-1 um and rotation repeatability around +/-30 arcsec.

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Datasheet (PDF) ↗

Specifications

Travel range for X- and Y-axis (mm)±4.5
Rotation angular range for θz- axis (°)±5
Stage surface size(mm)150×150
Base plate dimension (mm)210×210
Overall height (mm)62.5
Transmission mechanismprecision ball screw,φ8×2
Guide mechanismcrossed-roller bearing guide
Main body material and surface treatmentBlack anodized aluminum alloy
Weight(Kg)6
Resolution of XY axis (step/half- step) (µm)10/5
20-fine-subdivison resolution of XY axis (µm)0.5
Repositioning accuracy (um)≤±3
Static parallelism (mm)≤0.03
Motion parallelism(µm)≤20
Max speed(mm/s)*20
Motor and stepping angle(°)2-phase 28 stepping motor, 1.8
Brand and model number of motorShinano,STP-28D1003-08
Working current(A)1.3
Holding torque of motor (N·m)0.0785
Brand and model number of stepping driver (optional)Moons, SR2
Type of plug for stage1*DB9 (pin)
Type of connection cableHigh flexibility cable (Helukabel, Germany)
Length of connection cable(m)0.2
Position-limit sensors (built-in), for each axis2*GP1S09xHCPI (Sharp, Japan)
Origin-point sensors (built-in), for each axis1*GP1S09xHCPI (Sharp, Japan)
Voltage of power supply for sensors (V)DC5~24V±10%
Control outputNPN open controller output DC5~24V 8mA or less Residual voltage 0.3V or less (when load current is 2mA)
Status of output portsOutput ON when sensor is blocked
Algorithms and formulas on multi- axis motionCan be provided (Free)
Software for stage control andCan be provided (Extra charge needed)
Horizontal direction(Kg)20

Applications

Automated scanning and mapping

Step-and-acquire across areas far wider than a single field of view.

Repeatable production indexing

Move parts between fixed stations with closed-loop encoders holding position over long shifts.

Programmable multi-axis motion

Coordinate several axes from software for processing, inspection and test sequences.