Closed-loop raster scanning
Capacitive feedback linearises the scan, removing the hysteresis that distorts open-loop images.
Opto-Mechanics · Ambient Piezo Stages - Standard scanner modules
SH30.XYZ.C
High-load XYZ piezo scanner; 30 x 30 x 15 um travel; 10 kg maximum payload; 500 Hz resonant frequency; capacitive closed-loop feedback for heavy samples or fixtures.
Datasheet (PDF) ↗Catalog context
Where SH30.XYZ.C fits
SH30.XYZ.C is listed in the Ambient Piezo Stages - Standard scanner modules family. The local catalog record provides these first selection fields: Active axes: X Y Z; Mass: 2 kg; Travel range(closed-loop): 30 X 30 X15 μm.
Specifications
| Active axes | X Y Z |
|---|---|
| Mass | 2 kg |
| Travel range(closed-loop) | 30 X 30 X15 μm |
| Resolution(open-loop) | 0.1 nm |
| Resolution(closed-loop) | 0.3 nm |
| Pitch/Yaw | 20/ 20/ 50 μrad |
| Resonant Frequency(no load) | 500 Hz |
| Max. Payload (horizontal mounting) | 10 kg |
| Max Driving Voltage | 150 V |
| Sensor Type | Capacitive Sensor |
| Cable | D-Sub 3W3 |
| Controller | MC-Archimedes.N series |
Application context
Why this design is used
Scanning probe microscopy
Provide the fine XY or XYZ scan under an AFM, STM or near-field head.
Confocal and Raman mapping
Step a sample through a focus in reproducible increments so map pixels correspond to real coordinates.
System integration
Integration and compatibility
Use these checks to connect SH30.XYZ.C to the surrounding optical, mechanical and control system. Every value shown is taken from this model's own specification record.
- Travel and resolution
- Travel range(closed-loop): 30 X 30 X15 μm · Resolution(open-loop): 0.1 nm
- Separate travel from resolution and both from repeatability. Repeatability is what an automated sequence actually depends on, and it is the figure most often absent from a headline specification.
- Drive and feedback
- Resolution(closed-loop): 0.3 nm · Controller: MC-Archimedes.N series
- Pair open-loop mechanics with the specified high-voltage or inertial driver, and closed-loop variants with the controller their capacitive, strain-gauge or encoder feedback requires. Matching connectors do not guarantee electrical compatibility.
- Load and mounting
- Resonant Frequency(no load): 500 Hz · Max. Payload (horizontal mounting): 10 kg
- Check the load rating in the orientation you will use it — a vertical or cantilevered load is a moment, not a mass — and match the base to an M6 pattern on a 25 mm grid or a 1/4"-20 pattern on a 1 inch grid.
Technical FAQ
Integration questions for SH30.XYZ.C
What travel and resolution does the SH30.XYZ.C provide?
Travel range(closed-loop): 30 X 30 X15 μm · Resolution(open-loop): 0.1 nm. Separate travel from resolution and both from repeatability. Repeatability is what an automated sequence actually depends on, and it is the figure most often absent from a headline specification.
Which controller does the SH30.XYZ.C require?
Resolution(closed-loop): 0.3 nm · Controller: MC-Archimedes.N series. Pair open-loop mechanics with the specified high-voltage or inertial driver, and closed-loop variants with the controller their capacitive, strain-gauge or encoder feedback requires. Matching connectors do not guarantee electrical compatibility.
What load can the SH30.XYZ.C carry, and how does it mount?
Resonant Frequency(no load): 500 Hz · Max. Payload (horizontal mounting): 10 kg. Check the load rating in the orientation you will use it — a vertical or cantilevered load is a moment, not a mass — and match the base to an M6 pattern on a 25 mm grid or a 1/4"-20 pattern on a 1 inch grid.
Specifying this part
What this model has to survive, and what it needs around it
Closed-loop travel is shorter than open-loop travel
The loop reserves headroom to correct within, so the usable range drops when the sensor is engaged: an S100.XY.C covers 120 × 120 µm open-loop against 100 × 100 µm closed-loop, and an S200 covers 240 × 240 against 200 × 200. Specify against the closed-loop number.
Flexure guiding, capacitive sensing
A piezo stack acting through flexure hinges with a capacitive sensor reading directly against the moving surface — no sliding contact, no backlash, and millisecond-class response.
Vacuum and non-magnetic versions
Most of the range is orderable as .HV (high vacuum), .UHV (ultra-high vacuum) or .NM (non-magnetic). The suffix changes materials, cabling and bake compatibility rather than the mechanics, so specify it against the chamber the stage will live in.
Full series comparison, controller pairing and mounting hardware on the ambient piezo stages overview, or work through the selection with the configurator.
Model selection
Nearby series comparison
Compare SH30.XYZ.C with the closest available models in the Ambient Piezo Stages - Standard scanner modules family.
| Selection parameter | SH30.XYZ.C (current) | SD15/30.X.C |
|---|---|---|
| Travel / adjustment | 30 X 30 X15 μm | 30 μm |
| Resolution / sensitivity | 0.1 nm | 0.2 nm |
| Mounting interface | 10 kg | — |
Related products
S100.X.C
Standard flexure-guided X-axis piezo scanner; 100 um X-axis travel; capacitive closed-loop feedback; closed-loop resolution 0.5 nm Z / 1 nm XY.
S300.X.C
Standard flexure-guided X-axis piezo scanner; 300 um X-axis travel; capacitive closed-loop feedback; closed-loop resolution 0.9 nm Z / 1.5 nm XY.
S500.X.C
Standard flexure-guided X-axis piezo scanner; 500 um X-axis travel; capacitive closed-loop feedback; closed-loop resolution 1.5 nm class.
S100.Z.C
Standard flexure-guided Z-axis piezo scanner; 100 um Z-axis travel; capacitive closed-loop feedback; closed-loop resolution 0.5 nm Z / 1 nm XY.
