Closed-loop raster scanning
Capacitive feedback linearises the scan, removing the hysteresis that distorts open-loop images.
Representative image of the product family.
Opto-Mechanics · Ambient Piezo Stages - Standard scanner modules
S300.XY.C
Standard flexure-guided XY-axis piezo scanner; 300 x 300 um XY travel; capacitive closed-loop feedback; closed-loop resolution 0.9 nm Z / 1.5 nm XY.
Datasheet (PDF) ↗Catalog context
Where S300.XY.C fits
S300.XY.C is listed in the Ambient Piezo Stages - Standard scanner modules family.
Specifications
Full specifications for this product are available on request. Contact us for the datasheet.
Application context
Why this design is used
Scanning probe microscopy
Provide the fine XY or XYZ scan under an AFM, STM or near-field head.
Confocal and Raman mapping
Step a sample through a focus in reproducible increments so map pixels correspond to real coordinates.
Specifying this part
What this model has to survive, and what it needs around it
Closed-loop travel is shorter than open-loop travel
The loop reserves headroom to correct within, so the usable range drops when the sensor is engaged: an S100.XY.C covers 120 × 120 µm open-loop against 100 × 100 µm closed-loop, and an S200 covers 240 × 240 against 200 × 200. Specify against the closed-loop number.
Flexure guiding, capacitive sensing
A piezo stack acting through flexure hinges with a capacitive sensor reading directly against the moving surface — no sliding contact, no backlash, and millisecond-class response.
Vacuum and non-magnetic versions
Most of the range is orderable as .HV (high vacuum), .UHV (ultra-high vacuum) or .NM (non-magnetic). The suffix changes materials, cabling and bake compatibility rather than the mechanics, so specify it against the chamber the stage will live in.
Full series comparison, controller pairing and mounting hardware on the ambient piezo stages overview, or work through the selection with the configurator.
Related products
S100.X.C
Standard flexure-guided X-axis piezo scanner; 100 um X-axis travel; capacitive closed-loop feedback; closed-loop resolution 0.5 nm Z / 1 nm XY.
S300.X.C
Standard flexure-guided X-axis piezo scanner; 300 um X-axis travel; capacitive closed-loop feedback; closed-loop resolution 0.9 nm Z / 1.5 nm XY.
S500.X.C
Standard flexure-guided X-axis piezo scanner; 500 um X-axis travel; capacitive closed-loop feedback; closed-loop resolution 1.5 nm class.
S100.Z.C
Standard flexure-guided Z-axis piezo scanner; 100 um Z-axis travel; capacitive closed-loop feedback; closed-loop resolution 0.5 nm Z / 1 nm XY.
