Opto-Mechanics · Ambient Piezo Stages - Standard scanner modules
S100.XY.C
Standard flexure-guided XY-axis piezo scanner; 100 x 100 um XY travel; capacitive closed-loop feedback; closed-loop resolution 0.5 nm Z / 1 nm XY.
Datasheet (PDF) ↗Specifications
| Active axes | X Y |
|---|---|
| Mass | 450 g |
| Travel range(open-loop) | 120 × 120 μm |
| Travel range(closed-loop) | 100 × 100 μm |
| Resolution(open-loop) | 0.2 nm |
| Resolution(closed-loop) | 1 nm |
| Linearity | 0.0003 |
| Resonant Frequency(X/Y/Z, no load) | 400/ 350 Hz |
| Stiffness | 0.5 N/um |
| Max. Payload (horizontal mounting) | 500 g |
| Sensor Type | Capacitive Sensor |
| Max Driving Voltage | 150 V |
| Cable | D-Sub 3W3 |
| Controller | MC-Archimedes.N series |
Applications
Closed-loop raster scanning
Capacitive feedback linearises the scan, removing the hysteresis that distorts open-loop images.
Scanning probe microscopy
Provide the fine XY or XYZ scan under an AFM, STM or near-field head.
Confocal and Raman mapping
Step a sample through a focus in reproducible increments so map pixels correspond to real coordinates.
Specifying this part
What this model has to survive, and what it needs around it
Closed-loop travel is shorter than open-loop travel
The loop reserves headroom to correct within, so the usable range drops when the sensor is engaged: an S100.XY.C covers 120 × 120 µm open-loop against 100 × 100 µm closed-loop, and an S200 covers 240 × 240 against 200 × 200. Specify against the closed-loop number.
Flexure guiding, capacitive sensing
A piezo stack acting through flexure hinges with a capacitive sensor reading directly against the moving surface — no sliding contact, no backlash, and millisecond-class response.
Vacuum and non-magnetic versions
Most of the range is orderable as .HV (high vacuum), .UHV (ultra-high vacuum) or .NM (non-magnetic). The suffix changes materials, cabling and bake compatibility rather than the mechanics, so specify it against the chamber the stage will live in.
Full series comparison, controller pairing and mounting hardware on the ambient piezo stages overview, or work through the selection with the configurator.
Related products
S100.X.C
Standard flexure-guided X-axis piezo scanner; 100 um X-axis travel; capacitive closed-loop feedback; closed-loop resolution 0.5 nm Z / 1 nm XY.
S300.X.C
Standard flexure-guided X-axis piezo scanner; 300 um X-axis travel; capacitive closed-loop feedback; closed-loop resolution 0.9 nm Z / 1.5 nm XY.
S500.X.C
Standard flexure-guided X-axis piezo scanner; 500 um X-axis travel; capacitive closed-loop feedback; closed-loop resolution 1.5 nm class.
S100.Z.C
Standard flexure-guided Z-axis piezo scanner; 100 um Z-axis travel; capacitive closed-loop feedback; closed-loop resolution 0.5 nm Z / 1 nm XY.
