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Opto-Mechanics · Cryogenic Piezo Stages - Open-loop scanners

Scanner25-z

Open-loop cryogenic Z flexure scanner; 20 um range at 300 K or 12 um at 4 K; friction-free flexure body; sub-nanometer positioning class; 75 V @300 K / 180 V @4 K drive range.

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Datasheet (PDF) ↗CAD Model (STEP) ↗

Specifications

Active axesZ
Footprint × hight25 x 25 x 8.5 mm
Mass20 g
Work EnvironmentDefault: 1.4 K~ 400 K, 1e-7 mbar, 35 Tesla
MainbodyDefault: Pure Ti, ULT: BeCu
WiresPhosphor Bronze Twisted Paired Wires, 20cm
Pin materialsPolyster(glass fiber filled), BeCu
Pins number2 pins
Travel range @300 K55 um
Drive VoltageMax. 75 V @300 K, Max. 180 V @4 K
Max. Load200 g
Capacitance @300 K4.2 uF
Resolution0.8 nm
Repeatibility<10 nm

Applications

Low-dissipation fine scan

No sensor excitation means no additional heat load where the cooling budget is tight.

Fine positioning within a coarse stack

Provide sub-nanometre trim above a stick-slip positioner that has done the travelling.

Relative-motion measurement

Suits scans where the observable depends on relative displacement, not absolute coordinates.

Specifying this part

What this model has to survive, and what it needs around it

Scan range falls below 4 K

Piezoelectric coefficients drop as temperature falls, so a flexure scanner does not deliver its room-temperature range at base. The drive electronics recover part of it through voltage headroom — these scanners are rated to 75 V at 300 K and 180 V at 4 K. Specify against the low-temperature figure for your model, not the 300 K one.

Friction-free flexure drive

A piezo stack acting through flexure hinges, with no sliding contact anywhere in the mechanism. Motion is smooth, continuous and reproducible with no stick-slip signature — which is what scanning probe microscopy at low temperature requires of a fine axis.

Heat load at the cold plate

Stick-slip inertial drives dissipate energy per step and draw no holding current once stopped, so the steady-state load on the mixing chamber is the wiring loom rather than the motor. Anchor the loom at each temperature stage and thermalise the moving body with an FTC copper braid.

Non-magnetic construction

Titanium bodies and BeCu fasteners throughout, rated for operation to 35 T and down to 30 mK with the .ULT option, at 2 × 10⁻¹¹ mbar with .UHV. A single steel screw substituted at installation is enough to compromise a high-field assembly.

Full series comparison, controller pairing and mounting hardware on the cryogenic piezo stages overview, or work through the selection with the configurator.