Opto-Mechanics · Ambient Piezo Stages - Carrier scanner stages
Carrier.S100.ZTxTy.C
Clear-aperture Z plus tip/tilt scanner; 100 um Z travel with matched microradian tilt range; capacitive closed-loop feedback for active focus and angular alignment.
Datasheet (PDF) ↗Specifications
| Active axes | Z, θX, θY |
|---|---|
| Travel range(Z, θX, θY) | 100 μm, ±1 mrad, ±1 mrad |
| Aperture | 80 × 80 mm |
| Z Linearity | 0.0003 |
| θ Linearity | 0.0015 |
| Z Resolution(closed-loop/ open loop) | 1 nm/ 0.5 nm |
| θ Resolution(closed-loop/ open loop) | 0.05 urad/0.04 urad |
| Repeatability(Z/ θ) | 10 nm/ ±0.05 urad |
| Stiffness | 2 N/um |
| Z Resonant Frequency(no load / 2.5kg) | 480/ 180 Hz |
| θ Resonant Frequency(no load / 2.5kg) | 500/ 190 Hz |
| Max. Payload (horizontal mounting) | 5 kg |
| Sensor Type | Capacitive Sensor |
| Max Driving Voltage | 150 V |
| Controller | MC-Archimedes.N series |
Applications
Combined coarse travel and fine scan
Reach a region of interest over millimetres, then scan it with nanometre steps on the same body.
Multi-axis sample manipulation
Drive XY, XYZ, tip/tilt or Rz combinations from a single integrated stage.
Clear-aperture transmission work
Open-centre variants pass the beam through the stage for transmission and inverted geometries.
Specifying this part
What this model has to survive, and what it needs around it
Multi-axis in one body
XY, XYZ, ZTxTy, XYRz and full six-axis variants built as one flexure assembly rather than a stack, which keeps the error budget and the height down. High-load and clear-aperture versions are available in the same family.
Vacuum and non-magnetic versions
Most of the range is orderable as .HV (high vacuum), .UHV (ultra-high vacuum) or .NM (non-magnetic). The suffix changes materials, cabling and bake compatibility rather than the mechanics, so specify it against the chamber the stage will live in.
Full series comparison, controller pairing and mounting hardware on the ambient piezo stages overview, or work through the selection with the configurator.
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