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Carrier.S100/200.XY.C

Opto-Mechanics · Ambient Piezo Stages - Carrier scanner stages

Carrier.S100/200.XY.C

Clear-aperture XY scanner stage; 100 um or 200 um travel per axis; 5 kg maximum payload; capacitive closed-loop feedback for sample scanning around an open optical path.

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Datasheet (PDF) ↗

Specifications

Active axesX Y
Travel range(closed-loop)200 X 200 μm
Aperture66 × 66 mm
Linearity0.0003
Resolution(closed-loop)2 nm
Resolution(open-loop)0.4 nm
Repeatability10 nm
Stiffness1 N/um
Resonant Frequency(no load / 2.5kg)340/ 100 Hz
Max. Payload (horizontal mounting)5 kg
Sensor TypeCapacitive Sensor
Max Driving Voltage150 V
ControllerMC-Archimedes.N series

Applications

Combined coarse travel and fine scan

Reach a region of interest over millimetres, then scan it with nanometre steps on the same body.

Multi-axis sample manipulation

Drive XY, XYZ, tip/tilt or Rz combinations from a single integrated stage.

Clear-aperture transmission work

Open-centre variants pass the beam through the stage for transmission and inverted geometries.

Specifying this part

What this model has to survive, and what it needs around it

Multi-axis in one body

XY, XYZ, ZTxTy, XYRz and full six-axis variants built as one flexure assembly rather than a stack, which keeps the error budget and the height down. High-load and clear-aperture versions are available in the same family.

Vacuum and non-magnetic versions

Most of the range is orderable as .HV (high vacuum), .UHV (ultra-high vacuum) or .NM (non-magnetic). The suffix changes materials, cabling and bake compatibility rather than the mechanics, so specify it against the chamber the stage will live in.

Full series comparison, controller pairing and mounting hardware on the ambient piezo stages overview, or work through the selection with the configurator.