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Opto-Mechanics · Ambient Piezo Stages - Carrier scanner stages

Carrier.S200.XYZTxTyRz.C

Six-axis clear-aperture scanner; 200 um XYZ travel with tip, tilt, and Rz rotation; capacitive closed-loop feedback for full sample-or-optic alignment.

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Datasheet (PDF) ↗

Specifications

Full specifications for this product are available on request. Contact us for the datasheet.

Applications

Combined coarse travel and fine scan

Reach a region of interest over millimetres, then scan it with nanometre steps on the same body.

Multi-axis sample manipulation

Drive XY, XYZ, tip/tilt or Rz combinations from a single integrated stage.

Clear-aperture transmission work

Open-centre variants pass the beam through the stage for transmission and inverted geometries.

Specifying this part

What this model has to survive, and what it needs around it

Multi-axis in one body

XY, XYZ, ZTxTy, XYRz and full six-axis variants built as one flexure assembly rather than a stack, which keeps the error budget and the height down. High-load and clear-aperture versions are available in the same family.

Vacuum and non-magnetic versions

Most of the range is orderable as .HV (high vacuum), .UHV (ultra-high vacuum) or .NM (non-magnetic). The suffix changes materials, cabling and bake compatibility rather than the mechanics, so specify it against the chamber the stage will live in.

Full series comparison, controller pairing and mounting hardware on the ambient piezo stages overview, or work through the selection with the configurator.