Combined coarse travel and fine scan
Reach a region of interest over millimetres, then scan it with nanometre steps on the same body.

Opto-Mechanics · Ambient Piezo Stages - Carrier scanner stages
Clear-aperture Z plus tip/tilt scanner; 100 um or 200 um Z travel with matched microradian tilt range; capacitive closed-loop feedback for active focus and angular alignment.
Datasheet (PDF) ↗Catalog context
Carrier.S100/200.ZTxTy.C is listed in the Ambient Piezo Stages - Carrier scanner stages family. The local catalog record provides these first selection fields: Active axes: Z, θX, θY; Travel range(Z, θX, θY): 200 μm, ±2 mrad, ±2 mrad; Aperture: 80 × 80 mm.
| Active axes | Z, θX, θY |
|---|---|
| Travel range(Z, θX, θY) | 200 μm, ±2 mrad, ±2 mrad |
| Aperture | 80 × 80 mm |
| Z Linearity | 0.0003 |
| θ Linearity | 0.0015 |
| Z Resolution(closed-loop/ open loop) | 1.5 nm/ 0.7 nm |
| θ Resolution(closed-loop/ open loop) | 0.1 urad/0.06 urad |
| Repeatability(Z/ θ) | 10 nm/ ±0.1 urad |
| Stiffness | 1.5 N/um |
| Z Resonant Frequency(no load / 2.5kg) | 350/ 125 Hz |
| θ Resonant Frequency(no load / 2.5kg) | 370/ 110 Hz |
| Max. Payload (horizontal mounting) | 5 kg |
| Sensor Type | Capacitive Sensor |
| Max Driving Voltage | 150 V |
| Controller | MC-Archimedes.N series |
Application context
Reach a region of interest over millimetres, then scan it with nanometre steps on the same body.
Drive XY, XYZ, tip/tilt or Rz combinations from a single integrated stage.
Open-centre variants pass the beam through the stage for transmission and inverted geometries.
System integration
Use these checks to connect Carrier.S100/200.ZTxTy.C to the surrounding optical, mechanical and control system. Every value shown is taken from this model's own specification record.
Technical FAQ
Travel range(Z, θX, θY): 200 μm, ±2 mrad, ±2 mrad · Z Resolution(closed-loop/ open loop): 1.5 nm/ 0.7 nm. Separate travel from resolution and both from repeatability. Repeatability is what an automated sequence actually depends on, and it is the figure most often absent from a headline specification.
θ Resolution(closed-loop/ open loop): 0.1 urad/0.06 urad · Controller: MC-Archimedes.N series. Pair open-loop mechanics with the specified high-voltage or inertial driver, and closed-loop variants with the controller their capacitive, strain-gauge or encoder feedback requires. Matching connectors do not guarantee electrical compatibility.
Z Resonant Frequency(no load / 2.5kg): 350/ 125 Hz · θ Resonant Frequency(no load / 2.5kg): 370/ 110 Hz. Check the load rating in the orientation you will use it — a vertical or cantilevered load is a moment, not a mass — and match the base to an M6 pattern on a 25 mm grid or a 1/4"-20 pattern on a 1 inch grid.
Specifying this part
XY, XYZ, ZTxTy, XYRz and full six-axis variants built as one flexure assembly rather than a stack, which keeps the error budget and the height down. High-load and clear-aperture versions are available in the same family.
Most of the range is orderable as .HV (high vacuum), .UHV (ultra-high vacuum) or .NM (non-magnetic). The suffix changes materials, cabling and bake compatibility rather than the mechanics, so specify it against the chamber the stage will live in.
Full series comparison, controller pairing and mounting hardware on the ambient piezo stages overview, or work through the selection with the configurator.
Model selection
Compare Carrier.S100/200.ZTxTy.C with the closest available models in the Ambient Piezo Stages - Carrier scanner stages family.
| Selection parameter | Carrier.S100/200.ZTxTy.C (current) | Carrier.S100/200.Z.C | Carrier.S100/200/300.XYZ.C |
|---|---|---|---|
| Travel / adjustment | 200 μm, ±2 mrad, ±2 mrad | 200 μm | 200 X 200 X 200 μm |
| Resolution / sensitivity | 1.5 nm/ 0.7 nm | 1 nm | 1.5 nm |
| Load / optic size | 80 × 80 mm | 80 × 80 mm | 66 × 66 mm |
| Mounting interface | 5 kg | 5 kg | 5 kg |
Carrier.S100.Z.C
Clear-aperture Z scanner stage; 100 um Z travel; 5 kg maximum payload; capacitive closed-loop feedback for microscope sample carriers.
Carrier.S200.Z.C
Clear-aperture Z scanner stage; 200 um Z travel; 5 kg maximum payload; capacitive closed-loop feedback for microscope sample carriers.
Carrier.S100/200.Z.C
Clear-aperture Z scanner stage; 100 um or 200 um Z travel; 5 kg maximum payload; capacitive closed-loop feedback for microscope sample carriers.
Carrier.S100.XY.C
Clear-aperture XY scanner stage; 100 um travel per axis; 5 kg maximum payload; capacitive closed-loop feedback for sample scanning around an open optical path.
Before you specify
Engineering context for choosing this class of component, with the tradeoffs worked through on real specifications.
NanopositioningDecide what to move — sample, objective or both — then turn field of view, stack depth, settling and synchronisation into stage specifications. Comparison tables, an acquisition-time calculator, three configurations and a purchasing checklist on documented objective scanners, clear-aperture XYZ stages and controllers.
Open guide
NanopositioningWhy an open-loop piezo is wrong by 15 % of its travel, how creep grows with the logarithm of hold time, what strain-gauge and capacitive feedback actually fix — and the bandwidth and sensor noise a servo costs you in return.
Open guide
NanopositioningPiezo ceramic strains by one part in a thousand, so a 20 mm stack gives 20 µm. Every stage architecture is a different way around that limit — and each one wins a different experiment.
Open guide