Opto-Mechanics · Ambient Piezo Stages - Parallel platforms
Free6D.3-2.150
Six-DOF parallel-kinematic ambient piezo platform; XYZ plus Tx/Ty/Rz motion; +/-10 mm X/Y and +/-5 mm Z travel; +/-10 deg Tx/Ty and +/-20 deg Rz travel; 1 kg payload; 20 nm linear and 1 urad angular incremental motion.
Datasheet (PDF) ↗Specifications
| Active axes | X Y Z θX θY θZ |
|---|---|
| Max. Payload (horizontal mounting) | 1kg |
| Mass | 1.4kg |
| Travel range X, Y, Z * | ±10, ±10, ±5mm |
| Travel Range θX, θY, θZ * | ±10, ±10, ±14 ° |
| Unidirection Repeatability X, Y, Z | ±0.15, ±0.15, ±0.1 um |
| Unidirection Repeatability θX, θY, θZ | ±5, ±5, ±5 urad |
| Minimum Incremental Motion X, Y, Z | 10, 10, 10 nm |
| Minimum Incremental MotionθX, θY, θZ | 1, 1, 1 urad |
| Sensor Type | Optical Sensor |
| Sensor Resolution | 2 nm |
| Controller | MC-Free6D |
Applications
Six-degree-of-freedom alignment
Align an optic or detector in all translations and rotations around one defined pivot.
Optical assembly & bonding
Hold a component at the found position through adhesive dispense and cure.
Sample levelling
Remove tip, tilt and height error in one coordinated motion instead of three stacked axes.
Specifying this part
What this model has to survive, and what it needs around it
Six axes about one point, not six stacked stages
A parallel kinematic platform moves all axes from a common base, so there is no stack-up of guiding errors and no cable management through a tower. Its working volume is a coupled envelope rather than an independent range per axis — check the combined limits, not each axis alone.
Vacuum and non-magnetic versions
Most of the range is orderable as .HV (high vacuum), .UHV (ultra-high vacuum) or .NM (non-magnetic). The suffix changes materials, cabling and bake compatibility rather than the mechanics, so specify it against the chamber the stage will live in.
Full series comparison, controller pairing and mounting hardware on the ambient piezo stages overview, or work through the selection with the configurator.
Related products
Free3D.ZTxTy.150
Three-DOF parallel-kinematic ambient piezo platform; Z plus Tx/Ty motion; +/-5 mm Z travel; +/-3 deg angular travel; 3 kg payload; optical sensor feedback with 25 nm Z and 7.5 urad angular incremental motion.
Free6D.3-2.070
Compact six-DOF parallel-kinematic ambient piezo platform; +/-5 mm X/Y and +/-2.5 mm Z travel; large angular range up to +/-26 deg Rz; 100 g payload; 2 nm optical sensor feedback.
