Six-degree-of-freedom alignment
Align an optic or detector in all translations and rotations around one defined pivot.

Opto-Mechanics · Ambient Piezo Stages - Parallel platforms
Six-DOF parallel-kinematic ambient piezo platform; XYZ plus Tx/Ty/Rz motion; +/-10 mm X/Y and +/-5 mm Z travel; +/-10 deg Tx/Ty and +/-20 deg Rz travel; 1 kg payload; 20 nm linear and 1 urad angular incremental motion.
Datasheet (PDF) ↗Catalog context
Free6D.3-2.150 is listed in the Ambient Piezo Stages - Parallel platforms family. The local catalog record provides these first selection fields: Active axes: X Y Z θX θY θZ; Max. Payload (horizontal mounting): 1kg; Mass: 1.4kg.
| Active axes | X Y Z θX θY θZ |
|---|---|
| Max. Payload (horizontal mounting) | 1kg |
| Mass | 1.4kg |
| Travel range X, Y, Z * | ±10, ±10, ±5mm |
| Travel Range θX, θY, θZ * | ±10, ±10, ±14 ° |
| Unidirection Repeatability X, Y, Z | ±0.15, ±0.15, ±0.1 um |
| Unidirection Repeatability θX, θY, θZ | ±5, ±5, ±5 urad |
| Minimum Incremental Motion X, Y, Z | 10, 10, 10 nm |
| Minimum Incremental MotionθX, θY, θZ | 1, 1, 1 urad |
| Sensor Type | Optical Sensor |
| Sensor Resolution | 2 nm |
| Controller | MC-Free6D |
Application context
Align an optic or detector in all translations and rotations around one defined pivot.
Hold a component at the found position through adhesive dispense and cure.
Remove tip, tilt and height error in one coordinated motion instead of three stacked axes.
System integration
Use these checks to connect Free6D.3-2.150 to the surrounding optical, mechanical and control system. Every value shown is taken from this model's own specification record.
Technical FAQ
Travel range X, Y, Z *: ±10, ±10, ±5mm · Travel Range θX, θY, θZ *: ±10, ±10, ±14 °. Separate travel from resolution and both from repeatability. Repeatability is what an automated sequence actually depends on, and it is the figure most often absent from a headline specification.
Controller: MC-Free6D. Pair open-loop mechanics with the specified high-voltage or inertial driver, and closed-loop variants with the controller their capacitive, strain-gauge or encoder feedback requires. Matching connectors do not guarantee electrical compatibility.
Max. Payload (horizontal mounting): 1kg. Check the load rating in the orientation you will use it — a vertical or cantilevered load is a moment, not a mass — and match the base to an M6 pattern on a 25 mm grid or a 1/4"-20 pattern on a 1 inch grid.
Specifying this part
A parallel kinematic platform moves all axes from a common base, so there is no stack-up of guiding errors and no cable management through a tower. Its working volume is a coupled envelope rather than an independent range per axis — check the combined limits, not each axis alone.
Most of the range is orderable as .HV (high vacuum), .UHV (ultra-high vacuum) or .NM (non-magnetic). The suffix changes materials, cabling and bake compatibility rather than the mechanics, so specify it against the chamber the stage will live in.
Full series comparison, controller pairing and mounting hardware on the ambient piezo stages overview, or work through the selection with the configurator.
Model selection
Compare Free6D.3-2.150 with the closest available models in the Ambient Piezo Stages - Parallel platforms family.
| Selection parameter | Free6D.3-2.150 (current) | Free6D.3-2.070 | Free3D.ZTxTy.150 |
|---|---|---|---|
| Travel / adjustment | ±10, ±10, ±5mm | ±5, ±5, ±2.5 mm | ±5 mm |
| Resolution / sensitivity | 2 nm | 2 nm | 2 nm |
| Mounting interface | 1kg | 1 kg | 3 kg |
Free3D.ZTxTy.150
Three-DOF parallel-kinematic ambient piezo platform; Z plus Tx/Ty motion; +/-5 mm Z travel; +/-3 deg angular travel; 3 kg payload; optical sensor feedback with 25 nm Z and 7.5 urad angular incremental motion.
Free6D.3-2.070
Compact six-DOF parallel-kinematic ambient piezo platform; +/-5 mm X/Y and +/-2.5 mm Z travel; large angular range up to +/-26 deg Rz; 100 g payload; 2 nm optical sensor feedback.
Before you specify
Engineering context for choosing this class of component, with the tradeoffs worked through on real specifications.
NanopositioningDecide what to move — sample, objective or both — then turn field of view, stack depth, settling and synchronisation into stage specifications. Comparison tables, an acquisition-time calculator, three configurations and a purchasing checklist on documented objective scanners, clear-aperture XYZ stages and controllers.
Open guide
NanopositioningWhy an open-loop piezo is wrong by 15 % of its travel, how creep grows with the logarithm of hold time, what strain-gauge and capacitive feedback actually fix — and the bandwidth and sensor noise a servo costs you in return.
Open guide
NanopositioningPiezo ceramic strains by one part in a thousand, so a 20 mm stack gives 20 µm. Every stage architecture is a different way around that limit — and each one wins a different experiment.
Open guide