Zolix · Motorized Stages
NXP-6NP-R Parallel-Flexure Coupling Platform
6-axis parallel-flexure optical coupling platform with no sliding bearings. The monolithic architecture minimizes backlash and accumulated stack error, with an integrated closed-loop piezo actuator for nanometre positioning.
- Degrees of freedom
- X / Y / Z / Rx / Ry / Rz
- Linear travel
- 4 mm on X, Y, and Z
- Angular travel
- Rx / Ry / Rz: ±4° (70 mrad)
- Rotation centre
- Common centre; maximum crosstalk 100 µm
Specifications
| Degrees of freedom | X / Y / Z / Rx / Ry / Rz |
|---|---|
| Linear travel | 4 mm on X, Y, and Z |
| Angular travel | Rx / Ry / Rz: ±4° (70 mrad) |
| Rotation centre | Common centre; maximum crosstalk 100 µm |
| Architecture | Parallel flexure; no guide bearings or sliding interfaces |
| Drive orientation | Right-hand |
| Piezo travel | 19 µm typical, closed loop |
| Linear piezo resolution | 1 nm |
| Angular piezo resolution | 0.018 µrad |
| Maximum load | 1 kg |
| Resonant frequency | >130 Hz (±10%) |
| Thermal stability | 1 µm/°C |