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Scanner35-z Cryogenic Piezo Open-Loop Scanner

Zolix · Cryogenic Piezo Stages

Scanner35-z Cryogenic Piezo Open-Loop Scanner

Open-loop cryogenic Z flexure scanner; 35 x 35 x 14.5 mm body; 100 um range at 300 K (range reduces at cryogenic temperature); 500 g payload; 2 nm resolution, <10 nm repeatability; 75 V @300 K / 180 V @4 K drive range.

Travel range @300 K
100 um
Active axes
Z
Footprint × hight
35 x 35 x 14.5 mm
Mass
65 g
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Open-loop scanners

Specifications

Active axesZ
Footprint × hight35 x 35 x 14.5 mm
Mass65 g
Work EnvironmentDefault: 1.4 K~ 400 K, 1e-7 mbar, 35 Tesla
MainbodyDefault: Pure Ti, ULT: BeCu
WiresPhosphor Bronze Twisted Paired Wires, 20cm
Pin materialsPolyster(glass fiber filled), BeCu
Pins number2 pins
Travel range @300 K100 um
Drive VoltageMax. 75 V @300 K, Max. 180 V @4 K
Max. Load500 g
Capacitance @300 K8 uF
Resolution2 nm
Repeatibility<10 nm