Zolix · Ambient Piezo Stages
SH30.XYZ.C Piezo Standard Scanner Module
High-load XYZ piezo scanner; 30 x 30 x 15 um travel; 10 kg maximum payload; 500 Hz resonant frequency; capacitive closed-loop feedback for heavy samples or fixtures.
- Travel range(closed-loop)
- 30 X 30 X15 μm
- Max. Payload (horizontal mounting)
- 10 kg
- Active axes
- X Y Z
- Mass
- 2 kg
Specifications
| Active axes | X Y Z |
|---|---|
| Mass | 2 kg |
| Travel range(closed-loop) | 30 X 30 X15 μm |
| Resolution(open-loop) | 0.1 nm |
| Resolution(closed-loop) | 0.3 nm |
| Pitch/Yaw | 20/ 20/ 50 μrad |
| Resonant Frequency(no load) | 500 Hz |
| Max. Payload (horizontal mounting) | 10 kg |
| Max Driving Voltage | 150 V |
| Sensor Type | Capacitive Sensor |
| Cable | D-Sub 3W3 |
| Controller | MC-Archimedes.N series |