Zolix · Ambient Piezo Stages
SD15/30.X.C Piezo Standard Scanner Module
High-dynamic X-axis scanner family; 15 um or 30 um travel options; 3.3 kHz or 2.2 kHz resonant frequency; capacitive closed-loop feedback for fast beam or sample scanning.
- Travel range(closed-loop)
- 30 μm
- Active axes
- X
- Mass
- 350 g
- Resolution(closed-loop)
- 0.2 nm
Specifications
| Active axes | X |
|---|---|
| Mass | 350 g |
| Travel range(closed-loop) | 30 μm |
| Resolution(closed-loop) | 0.2 nm |
| Repeatability | 4 nm |
| Linearity | 0.0003 |
| Pitch/Yaw | 2 μrad |
| Resonant Frequency(no load) | 2.2 kHz |
| Resonant Frequency(300g) | 0.625 kHz |
| Stiffness | 18 N/um |
| Sensor Type | Capacitive Sensor |
| Cable | D-Sub 3W3 |
| Controller | MC-Archimedes.N series |