Zolix · Ambient Piezo Stages
S500.X.C Piezo Standard Scanner Module
Standard flexure-guided X-axis piezo scanner; 500 um X-axis travel; capacitive closed-loop feedback; closed-loop resolution 1.5 nm class.
- Travel range(open-loop)
- 600 um
- Max. Payload (horizontal mounting)
- 500 g
- Active axes
- X
- Mass
- 240 g
Specifications
| Active axes | X |
|---|---|
| Mass | 240 g |
| Travel range(open-loop) | 600 um |
| Travel range(closed-loop) | 500 um |
| Resolution(open-loop) | 0.7 nm |
| Resolution(closed-loop) | 1.5 nm |
| Linearity | 0.0003 |
| Pitch/Yaw | ±6/±6 urad |
| Resonant Frequency | 200 Hz |
| Max. Pull Force | 10 N |
| Max. Payload (horizontal mounting) | 500 g |
| Sensor Type | Capacitive Sensor |
| Max Driving Voltage | 150 V |
| Controller | MC-Archimedes.N series |