Zolix · Ambient Piezo Stages
S200.XYZ.C Piezo Standard Scanner Module
Standard flexure-guided XYZ-axis piezo scanner; 200 x 200 x 200 um XYZ travel; capacitive closed-loop feedback; closed-loop resolution about 1 nm class.
- Travel range(open-loop)
- 240 × 240 × 240 μm
- Max. Payload (horizontal mounting)
- 500 g
- Active axes
- X Y Z
- Mass
- 450 g
Specifications
| Active axes | X Y Z |
|---|---|
| Mass | 450 g |
| Travel range(open-loop) | 240 × 240 × 240 μm |
| Travel range(closed-loop) | 200 × 200 × 200 μm |
| Resolution(open-loop) | 0.4 nm |
| Resolution(closed-loop) | 1.5 nm |
| Linearity | 0.0003 |
| Resonant Frequency(X/Y/Z, no load) | 300/ 250/ 200 Hz |
| Stiffness | 0.25 N/um |
| Max. Payload (horizontal mounting) | 500 g |
| Sensor Type | Capacitive Sensor |
| Max Driving Voltage | 150 V |
| Cable | D-Sub 3W3 |
| Controller | MC-Archimedes.N series |