Zolix · Ambient Piezo Stages
S100.XYZ.C.P Piezo Standard Scanner Module
Standard flexure-guided XYZ-axis piezo scanner; 100 x 100 x 100 um XYZ travel; capacitive closed-loop feedback; closed-loop resolution 0.5 nm Z / 1 nm XY. Includes .P compact parallel stack / through-aperture configuration for optical access.
- Travel range(closed-loop)
- 100 × 100 × 100 μm
- Max. Payload (horizontal mounting)
- 200 g
- Active axes
- X Y Z
- Mass
- 200 g
Specifications
| Active axes | X Y Z |
|---|---|
| Mass | 200 g |
| Travel range(closed-loop) | 100 × 100 × 100 μm |
| Linearity | 0.0003 |
| Resolution(closed-loop) | 1 nm |
| Repeatability (X/Y/Z) | 10 nm |
| Resonant Frequency(X/Y/Z, no load) | 700/ 700/ 700 Hz |
| Max. Payload (horizontal mounting) | 200 g |
| Sensor Type | Capacitive Sensor |
| Max Driving Voltage | 150 V |
| Controller | MC-Archimedes.N series |