Zolix · Ambient Piezo Stages
S100.XYZ.C Piezo Standard Scanner Module
Standard flexure-guided XYZ-axis piezo scanner; 100 x 100 x 100 um XYZ travel; capacitive closed-loop feedback; closed-loop resolution 0.5 nm Z / 1 nm XY.
- Travel range(open-loop)
- 120 × 120 × 120 μm
- Max. Payload (horizontal mounting)
- 500 g
- Active axes
- X Y Z
- Mass
- 450 g
Specifications
| Active axes | X Y Z |
|---|---|
| Mass | 450 g |
| Travel range(open-loop) | 120 × 120 × 120 μm |
| Travel range(closed-loop) | 100 × 100 × 100 μm |
| Resolution(open-loop) | 0.2 nm |
| Resolution(closed-loop) | 1 nm |
| Linearity | 0.0003 |
| Resonant Frequency(X/Y/Z, no load) | 400/ 350/ 300 Hz |
| Stiffness | 0.5 N/um |
| Max. Payload (horizontal mounting) | 500 g |
| Sensor Type | Capacitive Sensor |
| Max Driving Voltage | 150 V |
| Cable | D-Sub 3W3 |
| Controller | MC-Archimedes.N series |