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Carrier.L1010s.XY Planar Carrier Stage

Zolix · Ambient Piezo Stages

Carrier.L1010s.XY Planar Carrier Stage

Carrier XY microscopy stage; 100 x 100 mm travel; 20 x 20 mm full aperture or 50 x 50 mm limited aperture; 4 kg air payload or 2 kg vacuum payload; 10 nm resolution.

Travel range
100 X 100 mm
Minimum Incremental Motion(Close-loop)
10 nm
Max. Payload (horizontal mounting)
4 kg
Active axes
X Y
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Planar carriers

Specifications

Active axesX Y
Travel range100 X 100 mm
Max. Velocity10 mm/s
Minimum Incremental Motion(Close-loop)10 nm
Max. Push Force2 N
Holding Force4 N
Max. Payload (horizontal mounting)4 kg
Pitch/Yaw0.3 mrad
Sensor TypeOptical Sensor
Sensor Resolution2 nm
ControllerMC-Newton.S series