Zolix · Ambient Piezo Stages
Free6D.3-2.070 Parallel Piezo Platform
Compact six-DOF parallel-kinematic ambient piezo platform; +/-5 mm X/Y and +/-2.5 mm Z travel; large angular range up to +/-26 deg Rz; 100 g payload; 2 nm optical sensor feedback.
- Travel range X, Y, Z *
- ±5, ±5, ±2.5 mm
- Unidirection Repeatability X, Y, Z
- ±0.15, ±0.15, ±0.1 um
- Max. Payload (horizontal mounting)
- 1 kg
- Active axes
- X Y Z θX θY θZ
Specifications
| Active axes | X Y Z θX θY θZ |
|---|---|
| Max. Payload (horizontal mounting) | 1 kg |
| Mass | 400 g |
| Travel range X, Y, Z * | ±5, ±5, ±2.5 mm |
| Travel Range θX, θY, θZ * | ±16, ±13, ±26 ° |
| Unidirection Repeatability X, Y, Z | ±0.15, ±0.15, ±0.1 um |
| Unidirection Repeatability θX, θY, θZ | ±8, ±8, ±8 urad |
| Minimum Incremental Motion X, Y, Z | 10, 10, 10 nm |
| Minimum Incremental MotionθX, θY, θZ | 1, 1, 1 urad |
| Sensor Type | Optical Sensor |
| Sensor Resolution | 2 nm |
| Controller | MC-Free6D |