Zolix · Ambient Piezo Stages
Free3D.ZTxTy.150 Parallel Piezo Platform
Three-DOF parallel-kinematic ambient piezo platform; Z plus Tx/Ty motion; +/-5 mm Z travel; +/-3 deg angular travel; 3 kg payload; optical sensor feedback with 25 nm Z and 7.5 urad angular incremental motion.
- Travel range Z *
- ±5 mm
- Minimum Incremental Motion Z
- 25 nm
- Max. Payload (horizontal mounting)
- 3 kg
- Active axes
- Z θX θY
Specifications
| Active axes | Z θX θY |
|---|---|
| Max. Payload (horizontal mounting) | 3 kg |
| Mass | 1.5 kg |
| Travel range Z * | ±5 mm |
| Travel Range θX, θY * | ±3, ±3 ° |
| Max. Velocity | 10mm/s, 5°/s |
| Minimum Incremental Motion Z | 25 nm |
| Minimum Incremental MotionθX, θY | 7.5, 7.5 urad |
| Unidirection Repeatability Z | ±0.15 um |
| Unidirection Repeatability θX, θY | ±2.5, ±2.5 urad |
| Sensor Type | Optical Sensor |
| Sensor Resolution | 2 nm |
| Controller | MC-Newton.MS3 |