Zolix · Ambient Piezo Stages
Carrier.OBHL100.C Piezo Objective Scanner
High-load objective Z scanner; 100 um Z travel; 1 nm closed-loop resolution; 560 Hz resonant frequency at 150 g load for high-bandwidth focusing.
- Travel range
- 100 μm
- Active axes
- Z
- Mass
- 500 g
- Linearity
- 0.0003
Specifications
| Active axes | Z |
|---|---|
| Mass | 500 g |
| Travel range | 100 μm |
| Linearity | 0.0003 |
| Repeatability | 3 nm |
| Sensor Type | Capacitive Sensor |
| Resolution(open loop) | 0.3 nm |
| Resolution(closed-loop) | 1 nm |
| Response Time | 5 ms |
| Stiffness | 3 N/um |
| Resonant Frequency(no load) | 1 KHz |
| Resonant Frequency(150 g) | 560 Hz |
| Controller | MC-Archimedes.N series |