Zolix · Ambient Piezo Stages
Carrier.OB200.XY.C Piezo Objective Scanner
Objective XY scanner; 200 x 200 um XY travel; 20 mm clear aperture; 70 x 70 x 25 mm; 500 g payload; 2 nm closed-loop resolution, 10 nm repeatability; 350 Hz unloaded resonance; capacitive feedback.
- Travel range
- 200 X 200 μm
- Max. Payload (horizontal mounting)
- 500 g
- Active axes
- X Y
- Mass
- 280 g
Specifications
| Active axes | X Y |
|---|---|
| Mass | 280 g |
| Travel range | 200 X 200 μm |
| Clear Aperture | 20 mm |
| Resolution(closed-loop) | 2 nm |
| Repeatability | 10 nm |
| Linearity | 0.0003 |
| Resonant Frequency(no load) | 350 Hz |
| Max. Payload (horizontal mounting) | 500 g |
| Sensor Type | Capacitive Sensor |
| Max Driving Voltage | 150 V |
| Controller | MC-Archimedes.N series |