Zolix · Ambient Piezo Stages
Mirrors.Z12TxTy0101 Piezo Fast Steering Mirror
Tripod fast steering mirror; Z plus Tx/Ty motion; 12 um Z travel with +/-1 mrad angular travel; about 5.5 kHz resonant frequency; dynamic beam steering and phase tuning.
- Travel range(closed-loop)
- 12 um, 1 mrad, 1 mrad
- Active axes
- Z, Tx, Ty
- Resolution(open-loop)
- 0.2 nm, 0.05 urad, 0.05 urad
- Resolution(closed-loop)
- 0.4 nm, 0.1 urad, 0.1 urad
Specifications
| Active axes | Z, Tx, Ty |
|---|---|
| Travel range(closed-loop) | 12 um, 1 mrad, 1 mrad |
| Resolution(open-loop) | 0.2 nm, 0.05 urad, 0.05 urad |
| Resolution(closed-loop) | 0.4 nm, 0.1 urad, 0.1 urad |
| Linearity | 0.002 |
| Resonant Frequency(no load) | 5.5 kHz |
| Stiffness | 10 N/um |
| Sensor Type | SGS |
| Max Driving Voltage | 150 V |
| Working Temperature | -20 ~ 80 °C |
| Cable | D-Sub 3W3 |
| Controller | MC-Archimedes.N series |