Zolix · Ambient Piezo Stages
Mirrors.Z12 Piezo Fast Steering Mirror
Fast steering piston mirror module; Z-axis mirror motion; 12 um closed-loop travel; about 4 kHz resonant frequency; use for beam steering, phase tuning, or fast axial correction; .HV, .UHV, and .NM variants available.
- Travel range(open-loop)
- 15 μm
- Max. Payload (horizontal mounting)
- 200 g
- Active axes
- Z
- Mass
- 40 g
Specifications
| Active axes | Z |
|---|---|
| Mass | 40 g |
| Travel range(open-loop) | 15 μm |
| Travel range(closed-loop) | 12 μm |
| Resolution(closed-loop) | 0.2 nm |
| Linearity | 0.001 |
| Stiffness | 40 N/um |
| Resonant Frequency(no load) | 4 kHz |
| Max. Payload (horizontal mounting) | 200 g |
| Sensor Type | SGS |
| Max Driving Voltage | 150 V |
| Cable | D-Sub 3W3 |
| Controller | MC-Archimedes.N series |