Opto-Mechanics · Ambient Piezo Stages - Lab goniometers
GS65-97.Lab
Lab goniometer stage; 70 x 70 mm footprint; +/-10 deg tilt; 97 mm rotation radius; 2 kg payload; 0.02 urad minimum incremental motion; co-pivot pair with GS65-77.Lab.
Datasheet (PDF) ↗Specifications
| Active axes | θX |
|---|---|
| Mass | 310 g |
| Travel range | ±10 ° |
| Max Driving Frequency | 20 kHz |
| Nominal Radius of Rotation | 97 mm |
| Max. Velocity | 3 °/s |
| Minimum Incremental Motion(Close-loop) | 1 urad |
| Unidirection Repeatability | ±7.5 urad |
| Max. Payload (horizontal mounting) | 2 kg |
| Holding Torque | 400 N·mm |
| Driving Torque | 150 N·mm |
| Sensor Type | Optical Sensor |
| Sensor Resolution | 0.02 urad |
| Controller | MC-Newton.S series |
Toepassingen
Tip/tilt rond een monstervlak
Corrigeer monsterkanteling zonder het interessepunt uit het beeldveld te verplaatsen.
Regeling van invalshoek
Stel de invalshoek in voor reflectometrie, ellipsometrie en scherende inval.
Uitlijning van optiek
Zet een spiegel, tralie of detector haaks op de bundel, waarbij een vast draaipunt de geometrie behoudt.
Specifying this part
What this model has to survive, and what it needs around it
Tilt about a point above the plate
Each goniometer tilts about a centre a fixed height above its own mounting surface, so a theta and phi pair share one virtual pivot. Get that height right against your sample plane or the beam walks as you tilt.
Vacuum and non-magnetic versions
Most of the range is orderable as .HV (high vacuum), .UHV (ultra-high vacuum) or .NM (non-magnetic). The suffix changes materials, cabling and bake compatibility rather than the mechanics, so specify it against the chamber the stage will live in.
Full series comparison, controller pairing and mounting hardware on the ambient piezo stages overview, or work through the selection with the configurator.
Related products
GS35-35.Lab
Lab goniometer stage; 35 x 35 mm footprint; +/-8 deg tilt; 35 mm rotation radius; 1 kg payload; 0.05 urad minimum incremental motion; co-pivot pair with GS35-55.Lab.
GS35-55.Lab
Lab goniometer stage; 35 x 35 mm footprint; +/-8 deg tilt; 55 mm rotation radius; 1 kg payload; 0.03 urad minimum incremental motion; co-pivot pair with GS35-35.Lab.
GS65-77.Lab
Lab goniometer stage; 70 x 70 mm footprint; +/-10 deg tilt; 77 mm rotation radius; 2 kg payload; 0.03 urad minimum incremental motion; co-pivot pair with GS65-97.Lab.
