Opto-Mechanics · Ambient Piezo Stages - Fast steering mirrors
Mirrors.Z12TxTy0101
Tripod fast steering mirror; Z plus Tx/Ty motion; 12 um Z travel with +/-1 mrad angular travel; about 5.5 kHz resonant frequency; dynamic beam steering and phase tuning.
Datasheet (PDF) ↗Specifications
| Active axes | Z, Tx, Ty |
|---|---|
| Travel range(closed-loop) | 12 um, 1 mrad, 1 mrad |
| Resolution(open-loop) | 0.2 nm, 0.05 urad, 0.05 urad |
| Resolution(closed-loop) | 0.4 nm, 0.1 urad, 0.1 urad |
| Linearity | 0.002 |
| Resonant Frequency(no load) | 5.5 kHz |
| Stiffness | 10 N/um |
| Sensor Type | SGS |
| Max Driving Voltage | 150 V |
| Working Temperature | -20 ~ 80 °C |
| Cable | D-Sub 3W3 |
| Controller | MC-Archimedes.N series |
Toepassingen
Closed-loop bundelstabilisatie
Corrigeer richtingsdrift en laagfrequente jitter voordat die het monster of de detector bereikt.
Optisch scannen en dithering
Stuur een bundel over een veld of moduleer zijn positie sneller dan een tafel het monster kan bewegen.
Uitlijning van vrijeruimteverbindingen
Houd een verzonden bundel op een verre apertuur terwijl houder en gebouw bewegen.
Specifying this part
What this model has to survive, and what it needs around it
Strain gauges, because bandwidth beats linearity here
These use SGS sensors rather than capacitive, trading ultimate linearity for the millisecond response beam stabilisation needs. Closed-loop range is ±1.5 mrad on the 0303 and ±5 mrad on the 1010, with 0.1 to 0.5 µrad closed-loop resolution.
Vacuum and non-magnetic versions
Most of the range is orderable as .HV (high vacuum), .UHV (ultra-high vacuum) or .NM (non-magnetic). The suffix changes materials, cabling and bake compatibility rather than the mechanics, so specify it against the chamber the stage will live in.
Full series comparison, controller pairing and mounting hardware on the ambient piezo stages overview, or work through the selection with the configurator.
Related products
Mirrors.Z12
Fast steering piston mirror module; Z-axis mirror motion; 12 um closed-loop travel; about 4 kHz resonant frequency; use for beam steering, phase tuning, or fast axial correction; .HV, .UHV, and .NM variants available.
Mirrors.TxTy.0303
Fast steering tip/tilt mirror; two angular axes; +/-1.5 mrad closed-loop travel per axis; about 2 kHz resonant frequency; compact beam steering with .HV, .UHV, and .NM variants available.
Mirrors.TxTy.1010
Fast steering tip/tilt mirror; two angular axes; +/-5 mrad closed-loop travel per axis; about 1 kHz resonant frequency; large-range beam steering with .HV, .UHV, and .NM variants available.
