Opto-Mechanics · Ambient Piezo Stages - Carrier scanner stages
Carrier.S100.XYZ.C
Clear-aperture XYZ scanner stage; 100 um travel per linear axis; 5 kg maximum payload; capacitive closed-loop feedback for focus and lateral sample scanning.
Datasheet (PDF) ↗Specifications
| Active axes | X Y Z |
|---|---|
| Travel range | 100 X 100 X 100 μm |
| Aperture | 66 × 66 mm |
| Resolution(closed-loop) | 1 nm |
| Resolution(open-loop) | 0.3 nm |
| Repeatability | 10 nm |
| Linearity | 0.0003 |
| Crosstalk(Z-XY) | ±30 nm |
| Resonant Frequency(X Y Z no load) | 180/ 180/ 390 Hz |
| Resonant Frequency(X Y Z 350g) | 150/ 150/ 250 Hz |
| Max. Payload (horizontal mounting) | 5 kg |
| Sensor Type | Capacitive Sensor |
| Max Driving Voltage | 150 V |
| Controller | MC-Archimedes.N series |
Toepassingen
Gecombineerde grove slag en fijnscan
Bereik een interessegebied over millimeters en scan het daarna met nanometerstappen op hetzelfde lichaam.
Meerassige monstermanipulatie
Stuur XY-, XYZ-, tip/tilt- of Rz-combinaties vanuit één geïntegreerde tafel.
Werk in transmissie met vrije apertuur
Varianten met open centrum laten de bundel door de tafel voor transmissie- en omgekeerde geometrieën.
Specifying this part
What this model has to survive, and what it needs around it
Multi-axis in one body
XY, XYZ, ZTxTy, XYRz and full six-axis variants built as one flexure assembly rather than a stack, which keeps the error budget and the height down. High-load and clear-aperture versions are available in the same family.
Vacuum and non-magnetic versions
Most of the range is orderable as .HV (high vacuum), .UHV (ultra-high vacuum) or .NM (non-magnetic). The suffix changes materials, cabling and bake compatibility rather than the mechanics, so specify it against the chamber the stage will live in.
Full series comparison, controller pairing and mounting hardware on the ambient piezo stages overview, or work through the selection with the configurator.
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Carrier.S100/200.Z.C
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Carrier.S100.XY.C
Clear-aperture XY scanner stage; 100 um travel per axis; 5 kg maximum payload; capacitive closed-loop feedback for sample scanning around an open optical path.
