Zolix · Ambient Piezo Stages
Carrier.S300.XYZ.C Piezo Carrier Scanner Stage
Clear-aperture XYZ scanner stage; 300 um travel per linear axis; 5 kg maximum payload; capacitive closed-loop feedback for focus and lateral sample scanning.
- Travel range
- 300 X 300 X 300 μm
- Max. Payload (horizontal mounting)
- 3 kg
- Active axes
- X Y Z
- Aperture
- 66 × 66 mm
Specifications
| Active axes | X Y Z |
|---|---|
| Travel range | 300 X 300 X 300 μm |
| Aperture | 66 × 66 mm |
| Resolution(closed-loop) | 2 nm |
| Resolution(open-loop) | 0.5 nm |
| Repeatability | 10 nm |
| Linearity | 0.0003 |
| Crosstalk(Z-XY) | ±50 nm |
| Resonant Frequency(X Y Z no load) | 135/ 135/ 250 Hz |
| Resonant Frequency(X Y Z 350g) | 90/ 90/ 140 Hz |
| Max. Payload (horizontal mounting) | 3 kg |
| Sensor Type | Capacitive Sensor |
| Max Driving Voltage | 150 V |
| Controller | MC-Archimedes.N series |