Zolix · Ambient Piezo Stages
Carrier.S100.ZTxTy.C Piezo Carrier Scanner Stage
Clear-aperture Z plus tip/tilt scanner; 100 um Z travel with matched microradian tilt range; capacitive closed-loop feedback for active focus and angular alignment.
- Travel range(Z, θX, θY)
- 100 μm, ±1 mrad, ±1 mrad
- Max. Payload (horizontal mounting)
- 5 kg
- Active axes
- Z, θX, θY
- Aperture
- 80 × 80 mm
Specifications
| Active axes | Z, θX, θY |
|---|---|
| Travel range(Z, θX, θY) | 100 μm, ±1 mrad, ±1 mrad |
| Aperture | 80 × 80 mm |
| Z Linearity | 0.0003 |
| θ Linearity | 0.0015 |
| Z Resolution(closed-loop/ open loop) | 1 nm/ 0.5 nm |
| θ Resolution(closed-loop/ open loop) | 0.05 urad/0.04 urad |
| Repeatability(Z/ θ) | 10 nm/ ±0.05 urad |
| Stiffness | 2 N/um |
| Z Resonant Frequency(no load / 2.5kg) | 480/ 180 Hz |
| θ Resonant Frequency(no load / 2.5kg) | 500/ 190 Hz |
| Max. Payload (horizontal mounting) | 5 kg |
| Sensor Type | Capacitive Sensor |
| Max Driving Voltage | 150 V |
| Controller | MC-Archimedes.N series |