Zolix · Cryogenic Piezo Stages
Scanner16-xy Cryogenic Piezo Open-Loop Scanner
Open-loop cryogenic XY flexure scanner; 16 x 16 x 9 mm body; 30 x 30 um range at 300 K (range reduces at cryogenic temperature); 100 g payload; 0.5 nm resolution, <10 nm repeatability; 75 V @300 K / 180 V @4 K drive range.
- Travel range @300 K
- 30 x 30 um
- Active axes
- X Y
- Footprint × hight
- 16 x 16 x 7 mm
- Mass
- 8 g
Specifications
| Active axes | X Y |
|---|---|
| Footprint × hight | 16 x 16 x 7 mm |
| Mass | 8 g |
| Work Environment | Default: 1.4 K~ 400 K, 1e-7 mbar, 35 Tesla |
| Mainbody | Default: Pure Ti, ULT: BeCu |
| Wires | Phosphor Bronze Twisted Paired Wires, 20cm |
| Pin materials | Polyster(glass fiber filled), BeCu |
| Pins number | 2 pins for each axis |
| Travel range @300 K | 30 x 30 um |
| Drive Voltage | Max. 75 V @300 K, Max. 180 V @4 K |
| Max. Load | 100 g |
| Capacitance @300 K | 1 uF |
| Resolution | 0.5 nm |
| Repeatibility | <10 nm |