Zolix · Ambient Piezo Stages
S300.Z.C Piezo Standard Scanner Module
Standard flexure-guided Z-axis piezo scanner; 300 um Z-axis travel; capacitive closed-loop feedback; closed-loop resolution 0.9 nm Z / 1.5 nm XY.
- Travel range(open-loop)
- 350 um
- Max. Payload (horizontal mounting)
- 500 g
- Active axes
- Z
- Mass
- 250 g
Specifications
| Active axes | Z |
|---|---|
| Mass | 250 g |
| Travel range(open-loop) | 350 um |
| Travel range(closed-loop) | 300 um |
| Resolution(open-loop) | 0.5 nm |
| Resolution(closed-loop) | 1 nm |
| Linearity | 0.0003 |
| Pitch/Yaw | ±200 urad |
| Resonant Frequency | 320 Hz |
| Stiffness | 0.25 N/µm |
| Max. Payload (horizontal mounting) | 500 g |
| Sensor Type | Capacitive Sensor |
| Max Driving Voltage | 150 V |
| Controller | MC-Archimedes.N series |