Zolix · Ambient Piezo Stages
S100.X.C Piezo Standard Scanner Module
Standard flexure-guided X-axis piezo scanner; 100 um X-axis travel; capacitive closed-loop feedback; closed-loop resolution 0.5 nm Z / 1 nm XY.
- Travel range(open-loop)
- 120 um
- Max. Payload (horizontal mounting)
- 500 g
- Active axes
- X
- Mass
- 160 g
Specifications
| Active axes | X |
|---|---|
| Mass | 160 g |
| Travel range(open-loop) | 120 um |
| Travel range(closed-loop) | 100 um |
| Resolution(open-loop) | 0.2 nm |
| Resolution(closed-loop) | 0.5 nm |
| Linearity | 0.0003 |
| Pitch/Yaw | ±3/±3 urad |
| Resonant Frequency | 700 Hz |
| Max. Pull Force | 10 N |
| Max. Payload (horizontal mounting) | 500 g |
| Sensor Type | Capacitive Sensor |
| Max Driving Voltage | 150 V |
| Controller | MC-Archimedes.N series |