Zolix · Ambient Piezo Stages
Free6D.3-2.150 Parallel Piezo Platform
Six-DOF parallel-kinematic ambient piezo platform; XYZ plus Tx/Ty/Rz motion; +/-10 mm X/Y and +/-5 mm Z travel; +/-10 deg Tx/Ty and +/-20 deg Rz travel; 1 kg payload; 20 nm linear and 1 urad angular incremental motion.
- Travel range X, Y, Z *
- ±10, ±10, ±5mm
- Unidirection Repeatability X, Y, Z
- ±0.15, ±0.15, ±0.1 um
- Max. Payload (horizontal mounting)
- 1kg
- Active axes
- X Y Z θX θY θZ
Specifications
| Active axes | X Y Z θX θY θZ |
|---|---|
| Max. Payload (horizontal mounting) | 1kg |
| Mass | 1.4kg |
| Travel range X, Y, Z * | ±10, ±10, ±5mm |
| Travel Range θX, θY, θZ * | ±10, ±10, ±14 ° |
| Unidirection Repeatability X, Y, Z | ±0.15, ±0.15, ±0.1 um |
| Unidirection Repeatability θX, θY, θZ | ±5, ±5, ±5 urad |
| Minimum Incremental Motion X, Y, Z | 10, 10, 10 nm |
| Minimum Incremental MotionθX, θY, θZ | 1, 1, 1 urad |
| Sensor Type | Optical Sensor |
| Sensor Resolution | 2 nm |
| Controller | MC-Free6D |